Evaporation area adjustable tungsten-molybdenum thin-walled evaporation boat

Abstract

The invention relates to an evaporation area adjustable tungsten-molybdenum evaporation boat. The evaporation boat comprises an evaporation boat containing bin bottom, a first clamping lug, a first clamping hole, a second clamping lug and a second clamping hole. The evaporation boat containing bin bottom, the first clamping lug and the second clamping lug are integrally formed by bending a tungsten-molybdenum thin film. The front and rear sides of the evaporation boat containing bin bottom are both provided with an evaporation boat containing bin front wall and an evaporation boat containing bin rear wall. The evaporation boat is integrally formed by bending the tungsten-molybdenum thin film to replace an original thick-walled evaporation boat. The cost of the evaporation boat is effectively reduced. Through combination with clamping spring devices, the evaporation boat with the thin film structure can have different molten metal evaporation surface shapes along with pretightening force of springs. By adjusting the pretightening force of the springs, the thickness of the tungsten-molybdenum alloy metal film, the angle between the clamping lugs and the evaporation boat bin bottom and the shape change rules of the evaporation boat, the evaporation area of molten melt in different remaining liquid proportions are kept constant, and the process quality of a vacuum coating is controlled.

Description

technical field [0001] The invention relates to the field of vacuum evaporation coating, in particular to a tungsten and molybdenum evaporation boat with adjustable evaporation area. Background technique [0002] Evaporation boat is a general term for all evaporation vessels. Depending on the purpose of use, its ingredient formula is also different. The materials involved include boron nitride, titanium diboride, aluminum nitride, aluminum oxide, zirconium oxide, silicon carbide, silicon nitride and other metal and non-metal compounds. In the 19th century, graphite materials were mostly used as evaporation boats, but due to serious pollution and low lifespan, they were rarely used. Vacuum evaporation packaging materials, capacitor metallization coating, display screen coating, bronzing coating, anti-counterfeiting logo coating, reflective coating, paper, textile aluminum plating, etc., mainly vapor deposition of aluminum, copper, silver, gold, etc. [0003] The most criti...

AI Technical Summary

Problems solved by technology

[0004] The current high-temperature alloy evaporation boats usually have a fixed-shape structure. The evaporation boat has thicker walls and lower resistance. To achieve the target temperature when energized, a higher current intensity is required, and the energy consumption is higher.

And with the deposition of evaporated metal on the wall during the repeated use of the evaporation boat, the internal space of the evaporation boat will be irregular, and the evaporation rate will decrease accordingly, and a relatively constant evaporation area of ​​the liquid surface cannot be stably maintained, which will affect the quality of processed products negative effect

In addition, the existing high-temperature alloy evaporation boats have low cycle times and high cost, resulting in high production costs, and avoiding thinner evaporation boats can bring lower production costs, but due to the thinner surface of the evaporation boat Thin, insufficient strength, cannot maintain a constant evaporation area when the amount of remaining liquid is small as the molten metal evaporates

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