Multi-transmission peak plasma filter based on MIM waveguide coupling cavity structure
A plasma and coupled cavity technology, applied in the field of micro-nano optoelectronics, can solve the problems of small number of transmission peaks, low transmittance, limited application range, etc., and achieve the effect of improving utilization, good performance, and easy integration
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[0029] In order to make the purpose, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in combination with specific examples and with reference to the accompanying drawings.
[0030] figure 1 It is a three-dimensional structural schematic diagram of a multi-transmission peak plasma filter based on the MIM waveguide coupling cavity structure of the present invention. The overall structure is mainly composed of a metal film 1 and a plurality of slit-hole structural units, and these multiple slit-hole structural units are evenly penetrated on the metal film. In order to obtain the best filtering performance, the length of the metal film is 2000nm, the width is 2000nm, and the thickness is 100nm. The plurality of slit structural units are mainly composed of waveguides and resonant cavities. The waveguide is divided into an incident waveguide 2 and an outgoing waveguide 3; the resonant cavity is com...
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