A stress-adjustable vertical structure LED chip and its preparation method
A LED chip and vertical structure technology, applied in the direction of semiconductor devices, electrical components, circuits, etc., can solve problems such as looseness, large difference in thermal expansion coefficient, bonding fragments, etc., to achieve good leakage prevention, avoid warping, The effect of reducing warping
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Embodiment 1
[0065] refer to Figure 3-5 , a stress-adjustable vertical structure LED chip, including TiW-based back gold 10, Si substrate 1, bonding layer 2, first TiW-based protective layer 3, Ag-based reflector layer 4, LED epitaxy sheet and Ti / Al / W / Au n-electrode layer 8; the LED epitaxial sheet includes an n-type doped GaN layer 7 grown on a Si substrate, and an InGaN / GaN quantum well layer grown on an n-type doped GaN layer 6. A p-type doped GaN layer 5 grown on the InGaN / GaN quantum well layer.
[0066] The Si substrate takes the (111) plane as the epitaxial plane; the thickness of the n-type doped GaN layer is 1 μm, and the doping concentration is 1×10 18 cm -3 ; The InGaN / GaN quantum well layer is a 2-cycle InGaN well layer / GaN barrier layer, wherein the thickness of the InGaN well layer is 3nm, and the thickness of the GaN barrier layer is 5nm; the thickness of the p-type doped GaN layer is 100nm, doped The concentration is 3×10 17 cm -3 .
[0067] The method for preparing ...
Embodiment 2
[0077] A stress-adjustable vertical structure LED chip, which sequentially includes a TiW-based back gold layer, a Si substrate, a bonding layer, a first TiW-based mirror protection layer, an Ag-based mirror layer, an LED epitaxial wafer, and a Ti / Al / W / Au n electrode layer; LED epitaxial wafer includes n-type doped GaN layer grown on Si substrate, InGaN / GaN quantum well layer grown on n-type doped GaN layer, grown on InGaN / A p-type doped GaN layer on a GaN quantum well layer.
[0078] The Si substrate takes the (111) plane as the epitaxial plane; the thickness of the n-type doped GaN layer is 2 μm, and the doping concentration is 6×10 18 cm -3 ; The InGaN / GaN quantum well layer is a 14-period InGaN well layer / GaN barrier layer, wherein the thickness of the InGaN well layer is 4nm, and the thickness of the GaN barrier layer is 10nm; the thickness of the p-type doped GaN layer is 300nm, doped The concentration is 6×10 17 cm -3 .
[0079] The method for preparing the stres...
Embodiment 3
[0089] A stress-adjustable vertical structure LED chip, which sequentially includes a TiW-based back gold layer, a Si substrate, a bonding layer, a first TiW-based mirror protection layer, an Ag-based mirror layer, an LED epitaxial wafer, and a Ti / Al / W / Au n electrode layer; LED epitaxial wafer includes n-type doped GaN layer grown on Si substrate, InGaN / GaN quantum well layer grown on n-type doped GaN layer, grown on InGaN / A p-type doped GaN layer on a GaN quantum well layer.
[0090] The Si substrate takes the (111) plane as the epitaxial plane; the thickness of the n-type doped GaN layer is 5 μm, and the doping concentration is 9×10 18 cm -3 ; The InGaN / GaN quantum well layer is an InGaN well layer / GaN barrier layer with 18 cycles, wherein the thickness of the InGaN well layer is 10nm, and the thickness of the GaN barrier layer is 18nm; the thickness of the p-type doped GaN layer is 600nm, doped The concentration is 8×10 17 cm -3 .
[0091] The method for preparing th...
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