Arsine/phosphine waste gas treatment device and arsine/phosphine waste gas treatment method
A waste gas treatment device and phosphine technology, applied in the direction of gas treatment, separation methods, chemical instruments and methods, etc., can solve problems such as manganese crystallization blockage, equipment shutdown, etc., achieve simple structure, improve treatment efficiency, and ensure treatment efficiency Effect
Pending Publication Date: 2018-11-23
CHANGZHOU TEXTILE GARMENT INST +1
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Problems solved by technology
Potassium permanganate solution is often used in the prior art to treat waste gas containing arsane / phosphine, and the potassium permanganate solution is sprayed from top to bottom to contact and absorb the waste gas containing arsine / phosphine in the spray tower. Potassium permanganate oxidation method treats arsenic-containing waste gas, but when potassium permanganate and arsenic-containing waste gas undergo oxidation-reduction reactions, manganese crystals will be produced to block the filling of the spray system, resulting in equipment shutdown
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[0055] The present invention will be described in detail in conjunction with accompanying drawing now. This figure is a simplified schematic diagram only illustrating the basic structure of the present invention in a schematic manner, so it only shows the components relevant to the present invention.
[0056] see figure 1 , the embodiment of the present invention provides an arsine / phosphine waste gas treatment device, which includes a liquid storage tank 1 , a spray system 2 , a sampling device 3 and a purification tower 4 .
[0057] A pH sensor 11, an oxidation-reduction potential (ORP) sensor 12, and a temperature sensor 13 are installed on the liquid storage tank 1 to monitor the absorption liquid in the liquid storage tank 1 in real time; a pH adjustment device is installed on one side of the liquid storage tank 1 14 and ORP regulator 15.
[0058] The top of the above-mentioned liquid storage tank 1 is provided with a sampling device 3 connected with the liquid storage ...
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The invention relates to an arsine / phosphine waste gas treatment device and an arsine / phosphine waste gas treatment method and belongs to the technical field of waste gas treatment. The arsine / phosphine waste gas treatment device provided by the invention comprises a liquid storage tank, a sample feeding device which is arranged on the liquid storage tank and is communicated with the liquid storage tank, a purification tower and a spraying system, wherein the sample feeding device comprises a connector with openings at two ends; a gas inlet and a liquid inlet are formed in the top of the connector; the connector is communicated with the purification tower through an upper space of the liquid storage tank; the spraying system comprises a circulating pump, a communication pipeline, a first spraying nozzle region and a second spraying nozzle region which are communicated with the liquid storage tank; a bottom structure of the purification tower is of a baffle plate with a hole; the purification tower is internally provided with a first separation plate and a second separation plate, which are used for dividing the purification tower into a first-grade purification tower and a second-grade purification tower; the first-grade purification tower and the second-grade purification tower are filled with filler; the first spraying nozzle region is arranged above the filler in the first-grade purification tower and the second spraying nozzle region is arranged above the filler in the second-grade purification tower. The treatment device provided by the invention has high treatment efficiency on waste gas.
Description
technical field [0001] The invention relates to an arsine / phosphine waste gas treatment device and an arsine / phosphine waste gas treatment method, belonging to the technical field of waste gas treatment. Background technique [0002] Arsane and phosphine are highly toxic substances to the human body. Medical toxicology studies have shown that adults who inhale 250ppm of arsine and phosphine gas will die quickly, and exposed to 30ppm of arsine and phosphine for 30 minutes can also be fatal . Long-term exposure to 10ppm arsine and phosphine can also be fatal. Symptoms of poisoning appeared after exposure to 0.5ppm arsine and phosphine. According to national environmental protection standards, the maximum allowable height of arsine and phosphine in the environment is 5×10 -8 . [0003] Arsane is mainly produced in the tail gas of furnace tubes, ion implantation processes, and MOCVD processes in the semiconductor industry. Phosphine is mainly produced in the tail gas of ace...
Claims
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Patent Timeline
Login to View More IPC IPC(8): B01D53/75B01D53/78B01D53/64B01D53/72
CPCB01D53/64B01D53/72B01D53/75B01D53/78B01D2257/55B01D2258/02
Inventor 刘艳云付华良颜瑞潘学明王家璇
Owner CHANGZHOU TEXTILE GARMENT INST