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Multiwavelength Laser Interferometer

A laser interferometer, multi-wavelength technology, applied in the direction of instruments, optical devices, measuring devices, etc., to achieve the effect of reducing the difficulty, widening the tolerance range of processing and assembly, and reducing the difficulty of processing

Active Publication Date: 2020-08-28
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0007] In order to solve the defect that most laser interferometers on the market have only one output wavelength, the present invention proposes a multi-wavelength laser interferometer
The device can measure the transmitted wavefront or reflected wavefront of planar optical elements in the wavelength range of 600nm~1600nm, and the working wavelength covers 632.8nm, 1053nm and 1064nm, and makes up for the existing single wavelength of 632.8nm, 1053nm and 1064nm Disadvantages of laser interferometers not being able to work at many other wavelengths

Method used

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Embodiment 2

[0024] Example 2, figure 2 It is a schematic diagram of the relationship between the height of the marginal ray (Marginal ray) of the output beam of the multi-wavelength laser interferometer with an output aperture of 130 mm and the input laser wavelength in Embodiment 2 of the present invention. It can be seen from the figure that when the output wavelength of the laser 1 changes within the range of 600nm to 1600nm, there is no need to move, adjust or change the beam expander secondary mirror 3, beam splitting prism 5 or collimating primary mirror described in this device 6. The device can output collimated beams at every wavelength. In the present embodiment, the three lenses in the collimating primary mirror 6 are composed of three different glass materials respectively, adopt positive, negative, and positive lens combinations, have super-achromatic (Super-achromatic) ability, and can be extremely Eliminate the chromatic aberration introduced by the ultra-wideband to the ...

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Abstract

A multi-wavelength laser interferometer comprises a laser, an aperture diaphragm, a beam expanding secondary mirror, a pinhole diaphragm, a beam splitter prism, a collimating main mirror, a transmission standard mirror, a piezoelectric ceramic transducer, a to-be-measured plane element, a reflection standard mirror, an imaging lens, a hyperspectral camera and a computer. The collimating main mirror in the interferometer is composed of three lenses, and the imaging lens and the beam expanding secondary mirror are identical in parameter and are both single lenses; and in order to reduce the processing difficulty of the lenses in the interferometer and the difficulty of light path adjustment of a whole system, the beam expanding secondary mirror and the collimating main mirror are each provided with one surface which can be a plane. The multi-wavelength laser interferometer can be used for measuring transmission wavefront or reflected wavefront of the to-be-measured plane optical elementin the wavelength range of 600 nm-1600 nm.

Description

technical field [0001] The invention relates to a planar optical element, in particular to a multi-wavelength laser interferometer for interferometric measurement of a planar optical element. Background technique [0002] Laser interferometry is an optical metrology method based on the principle of light interference. It is currently recognized as one of the most effective and accurate technical means for detecting the surface quality of optical components. The working wavelength of the laser interferometer commonly used at home and abroad is a single wavelength, mostly 632.8nm, 1053nm or 1064nm wavelength. However, for some optical components coated with narrow-band filter films, their reflectivity at 632.8nm, 1053nm or 1064nm wavelength is greater than 99% or transmittance is greater than 99%, which makes the commonly used laser interferometers on the market unable to collect to the desired interference fringes, making it impossible to detect them. [0003] For example, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B9/02
CPCG01B9/02015G01B9/02055
Inventor 刘世杰鲁棋周游王圣浩倪开灶潘靖宇邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI