Femtosecond laser preparation system and method for silicon photonic crystal waveguide device

Abstract

The invention discloses a femtosecond laser preparation system and method for a silicon photonic crystal waveguide device. The femtosecond laser preparation system for the silicon photonic crystal waveguide device comprises a femtosecond laser, a multistage half-wave plate, a polarization splitting prism, a first reflecting mirror, a spatial light modulator, a first lens, a second reflecting mirror, a third reflecting mirror, a second lens, an electric flip mirror, a fourth reflecting mirror, a high-power objective lens, a three-dimensional processing platform, a third lens, a CCD camera and acomputer. Lasers output by the femtosecond laser pass through the multistage half-wave plate and the polarization splitting prism and pass through the reflecting mirrors to shoot into the spatial light modulator. A processing scheme is generated to a hologram by the computer, and the hologram is loaded to the spatial light modulator. After modulation is completed, light beams pass through the first lens, the second reflecting mirror, the third reflecting mirror, the second lens and the fourth reflecting mirror, and then are focused on a silicon substrate through the high-power objective lens,the movement of the three-dimensional processing platform is controlled by a program input into the computer to complete the processing task. The femtosecond laser preparation system and method for the silicon photonic crystal waveguide device has simple processing steps, high processing accuracy, high processing speed and low processing cost.

Description

technical field [0001] The invention belongs to the field of laser micromachining, and relates to a femtosecond laser preparation system and method for a silicon photonic crystal waveguide device, in particular to a femtosecond laser preparation system and method for a silicon photonic crystal waveguide device based on a spatial light modulator. Background technique [0002] The light guiding mechanism of the traditional dielectric optical waveguide is based on the principle of total reflection of light, and the ability to bind light is very weak. Even if the waveguide is only bent at 5°, the general optical field has more than 50% radiation loss. Therefore, bending Loss is a very serious problem faced by the development of traditional dielectric optical waveguides, and has become the bottleneck of its development; photonic crystals are artificial microstructures formed by periodically arranging substances with different dielectric constants in space. Line defects are introd...

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Problems solved by technology

[0004] In order to overcome the problems of low precision and slow speed in the process of processing photonic crystal waveguides in the above-mentioned traditional methods, the present invention provides a femtosecond laser preparation system and method for silicon photonic crystal waveguides based on spatial light modulators, which can effectively improve Processing speed and processing accuracy

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