High-sensitivity toxic gas sensor and preparation method thereof

A poisonous gas, high-sensitivity technology, applied in the field of physical detection, can solve problems such as low detection limit, and achieve the effect of simple operation and easy portability

Active Publication Date: 2019-01-15
南京诺睿芯电子科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] However, since it is difficult to prepare two-dimensional material layers with vertically aligned structures in the existing technology, the preparation of toxic gas sensors with t

Method used

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  • High-sensitivity toxic gas sensor and preparation method thereof
  • High-sensitivity toxic gas sensor and preparation method thereof
  • High-sensitivity toxic gas sensor and preparation method thereof

Examples

Experimental program
Comparison scheme
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Embodiment 1

[0066] Embodiment 1: Preparation of highly sensitive toxic gas sensor

[0067] The preparation steps are as follows:

[0068] Step 1: Prepare silicon into a silicon wafer with a thickness of 500 μm as a semiconductor substrate, and deposit SiO with a thickness of 200 μm on the silicon wafer 2 barrier layer;

[0069] Step 2: SiO in Step 1 2 Evaporate a layer of molybdenum metal with a thickness of 10nm above the barrier layer, and carry out sulfuration treatment to this layer of metal molybdenum to obtain a molybdenum disulfide layer with a multilayer vertical arrangement structure with a thickness of about 15nm (during the sulfuration treatment, control the reaction The zone temperature is 770°C, and the heating temperature for sulfur powder is 220°C);

[0070] Step 3: Spin-coat photoresist on the molybdenum disulfide layer in step 2, and perform photolithography on the photoresist to obtain a template, and then etch the molybdenum disulfide layer through the template to ob...

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Abstract

The invention discloses a high sensitivity toxic gas sensor and a preparation method thereof, and belongs to the technical field of physical detection. The sensor utilizes the characteristic that theadsorption effect of the edge of a two-dimensional material is obviously superior to that of the surface of the two-dimensional material, and a two-dimensional transition metal sulfur/selenide layer is designed as a multi-layer vertical alignment structure, so that the minimum detection limit can reach 0.01 ppm. The preparation method overcomes the technical difficulty of preparing the two-dimensional transition metal sulfur/selenide with the multi-layer vertical alignment structure, and provides a new idea for the field of toxic gas detection.

Description

technical field [0001] The invention relates to a high-sensitivity toxic gas sensor and a preparation method thereof, belonging to the technical field of physical detection. Background technique [0002] Toxic gases such as nitric oxide, nitrogen dioxide, and ammonia are one of the main causes of acid rain, causing serious harm to people and the environment. When the concentration of nitrogen dioxide in the air exceeds 53ppb, the probability of severe respiratory diseases in children will increase greatly. Therefore, fast and accurate detection of these harmful gases is crucial to people's healthy life, industrial production, and agricultural supervision. [0003] Now, for toxic gases such as nitric oxide and nitrogen dioxide, toxic gas sensors made of two-dimensional materials have been developed, which utilize the characteristics that gas molecules will be adsorbed on the surface of two-dimensional materials through physical adsorption (van der Waals force) and Some gas ...

Claims

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Application Information

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IPC IPC(8): B01D53/04G01N27/12H01L21/02
CPCB01D53/0407B01D53/0446B01D2253/10B01D2253/104B01D2253/1128G01N27/125H01L21/02568H01L21/02614
Inventor 杨国锋汪金楚广勇薛俊俊昌建军王昱
Owner 南京诺睿芯电子科技有限公司
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