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A graphite boat for a crystalline silicon solar energy PERC battery and a saturation process thereof

A graphite boat and solar energy technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve problems such as the quality of the back passivation film affecting the service life of the graphite boat, the uneven surface of the graphite boat, and the corrosion of the silicon nitride film. Graphite boat, shortened saturation process time, and the effect of shortened time

Pending Publication Date: 2019-01-18
ZHEJIANG AIKO SOLAR ENERGY TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Moreover, the use of laughing gas in the back passivation process will corrode the silicon nitride film and cause the surface of the graphite boat to be uneven, which not only affects the service life of the graphite boat and the quality of the back passivation film, but also increases the debris of the process Rate

Method used

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  • A graphite boat for a crystalline silicon solar energy PERC battery and a saturation process thereof

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Experimental program
Comparison scheme
Effect test

Embodiment 1

[0024] Such as figure 1 As shown, a graphite boat 1 for crystalline silicon solar PERC cells of the present invention includes a graphite boat body, which is a prior art, and it mainly consists of insulating rods 3 and several unit boat sheets 21 arranged in the horizontal direction. Composition, the insulating rod 3 runs through the periphery of each unit boat 21 horizontally to connect and fix all the unit boats together. The inner and outer surfaces of the unit boats on the two outsides are provided with some grooves 4 that are identical in shape to the silicon wafer and whose size is smaller than the size of the silicon wafer. Vacuumized pores 10, the unit boat in the middle is provided with a number of through holes with the same shape as the silicon wafer and smaller than the size of the silicon wafer, and there are clamping points for fixing the silicon wafer on the periphery of the groove 4 and the through hole 7.

[0025] A SiC film 2 is coated on the entire surface...

Embodiment 2

[0034] The difference between this embodiment and embodiment 1 lies in that the thickness of the SiC film plated on the graphite boat body is 800nm ​​for the graphite boat used for the crystal silicon solar PERC cell.

[0035] The saturation process of the graphite boat for the above crystalline silicon solar PERC cell specifically includes the following steps:

[0036] (1) Put the cleaned and fully dried graphite boat body into the tubular PECVD furnace tube and vacuumize it;

[0037] (2) Set the deposition temperature of the furnace tube to 500°C;

[0038] (3) After reaching the deposition temperature, use NH3, the flow rate is 6slm, and the furnace tube pressure is 2000mtorr, and the RF power supply is 8000W, and the graphite boat body is discharged for 10min;

[0039] (4) After the discharge pretreatment is completed, 10slm CH4 and 1500sccm SiH4 are passed into the furnace tube, the furnace tube pressure is 2000mtorr, the RF power supply is 8000W, the RF duty ratio is 5:5...

Embodiment 3

[0042] The difference between this embodiment and Embodiment 1 lies in that the thickness of the SiC film plated on the graphite boat body is 1200nm for the graphite boat used in the crystal silicon solar PERC cell.

[0043] The saturation process of the graphite boat for the above crystalline silicon solar PERC cell specifically includes the following steps:

[0044] (1) Put the cleaned and fully dried graphite boat body into the tubular PECVD furnace tube and vacuumize it;

[0045] (2) Set the deposition temperature of the furnace tube to 450°C;

[0046] (3) After reaching the deposition temperature, use NH3, the flow rate is 6slm, and the furnace tube pressure is 1500mtorr, and the RF power supply is 6000W, and the graphite boat body is discharged for 6min;

[0047] (4) After the discharge pretreatment is completed, 8slm CH4 and 600sccm SiH4 are passed into the furnace tube, the furnace tube pressure is 1500mtorr, the radio frequency power supply is 6000W, the radio freque...

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Abstract

The invention discloses a graphite boat for a crystalline silicon solar energy PERC battery and a saturation process thereof, wherein the graphite boat comprises a graphite boat body, and SiC films are plated on all surfaces of the graphite boat body. A SiC film is plate on that graphite boat in the graphite boat saturation process of the invention, The SiC film has good corrosion resistance, so it will not be corroded by nitrous oxide in the back passivation process, and the surface of the graphite boat can be smooth, which not only protects the graphite boat, prolongs the service life of thegraphite boat, but also ensures the uniformity of the back passivation film and reduces the fragmentation rate. At the same time, due to the excellent wear resistance of SiC film, the EL scratch caused by friction can be reduced, and the subsequent saturation process time is greatly shortened, so that the productivity of the machine is improved.

Description

technical field [0001] The invention belongs to the technology of crystalline silicon solar cells, and in particular relates to a graphite boat for crystalline silicon solar PERC cells, and also relates to a saturation process of the graphite boat. Background technique [0002] In order to improve the anti-reflection and surface passivation effects of crystalline silicon cells, silicon nitride films are usually prepared on the surface of silicon wafers, and the surface state of graphite boats has an important impact on the uniform deposition of silicon nitride prepared by tubular PECVD. The conductivity of the graphite boat after cleaning is significantly better than that of the silicon wafer, so there is obvious competition between the graphite boat and the silicon wafer during the coating process, resulting in a low deposition rate in the area where the graphite boat contacts the silicon wafer, resulting in serious chromatic aberration. As a result, the battery sheet has p...

Claims

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Application Information

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IPC IPC(8): H01L21/673H01L31/18
CPCH01L31/1804H01L21/673Y02E10/547Y02P70/50
Inventor 张欣林纲正方结彬陈刚
Owner ZHEJIANG AIKO SOLAR ENERGY TECH CO LTD
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