Quartz crystal microbalance with annular indium tin oxide electrode

Abstract

The invention discloses a quartz crystal microbalance with an annular indium tin oxide electrode. The quartz crystal microbalance comprises a quartz crystal microbalance body, the annular indium tin oxide electrode prepared above the quartz crystal microbalance body and a round gold electrode below the quartz crystal microbalance body. The annular indium tin oxide electrode is led to the back of the quartz crystal microbalance body through a conductive material at the edge of the quartz crystal microbalance body. Silver nanoparticles are arranged in a transparent region in the middle of the annular indium tin oxide electrode to combine with localized surface plasmon resonance technology. According to high sensitivity and high resolution of the quartz crystal microbalance, the measurement error can be reduced to a very low level, and the design of the annular electrode can make the central region pervious to light, so that the two technologies of the quartz crystal microbalance and thelocalized surface plasmon resonance in different principles are structurally fused to form a dual technology chip with the annular electrode. The technology has a good technical prospect for complex-structure molecular characterization testing and high-sensitivity DNA and RNA detection.

Description

technical field [0001] The invention relates to a quartz crystal microbalance, in particular to the design and preparation of a quartz crystal microbalance with ring-shaped indium tin oxide electrodes, belonging to the field of semiconductor physical devices. Background technique [0002] Quartz crystal microbalance has high sensitivity, small size and strong vibration resistance, so it can be used to measure parameters that cannot be measured by other instruments with lower precision. QCM (Quartz Crystal Microbalance) uses the piezoelectric effect of the quartz crystal microbalance to convert the slight mass change on the quartz crystal microbalance into a change in vibration frequency. The size of the QCM accuracy depends on the resonant frequency Q, which is proportional to where Δm is the surface mass change of the quartz crystal microbalance, p q =2648kgm -3 is the density of the quartz crystal microbalance, t q is the thickness of the quartz crystal microbalance, ...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to overcome the quality "dry mass" of the actual biomolecules that cannot be measured by the quality detected by the QCM and the deficiency that the structural property parameters of the adsorption layer cannot be obtained by LSPR alone, and provide a dual-technology combination of QCM and LSPR Quartz Crystal Microbalance

Images