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Femtosecond laser processing and monitoring fusion method and device for confocal Raman-LIBS spectrum detection

A technology of femtosecond laser processing and spectral detection, applied in the field of femtosecond laser processing and monitoring fusion, can solve the problems of easy axial drift of samples, in-situ detection of complex shape and performance parameters of samples, etc., and achieve high-resolution monitoring and in-situ detection Effects of imaging, controllability improvement, and processing capability improvement

Inactive Publication Date: 2019-03-08
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

[0010] The purpose of the present invention is to provide a femtosecond laser processing monitoring fusion with confocal Raman-LIBS spectral detection in order to solve the problems of axial drift of samples in laser micro-nano processing and in-situ detection of complex shape and performance parameters of samples after processing. The method and device, the invention realizes the online monitoring of axial drift and inclination during sample processing and the nanoscale monitoring of the axial dimension of sample structure, ensures accurate real-time focusing of samples during processing, and realizes The comprehensive detection of sample microstructure and complex physical parameters provides a technical basis for feedback correction, mechanism research and process improvement of femtosecond laser processing, and improves the controllability of laser processing accuracy and the processing quality of samples

Method used

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  • Femtosecond laser processing and monitoring fusion method and device for confocal Raman-LIBS spectrum detection
  • Femtosecond laser processing and monitoring fusion method and device for confocal Raman-LIBS spectrum detection
  • Femtosecond laser processing and monitoring fusion method and device for confocal Raman-LIBS spectrum detection

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Embodiment 1

[0048] Such as figure 1 As shown, the computer 30 performs feedback control on the two-dimensional scanner 20, the precision workbench 10, and the axial scanner 8 to realize the three-dimensional scanning and position adjustment of the processing and monitoring of the sample 9; the femtosecond laser processing system consists of a femtosecond laser 17 , a laser space-time shaping module 18, and a two-dimensional scanner 20; the confocal detection module 13 may be composed of a detection objective lens 14 and an intensity detector 15; and the intensity detector 15 is located at the focus position of the detection objective lens 14.

[0049] The implementation steps of femtosecond laser processing confocal Raman and LIBS spectrum in-situ monitoring method are as follows:

[0050] 1) Place the sample 9 on the precision workbench 10, and the precision workbench 10 drives the sample 9 to perform scanning motion;

[0051] 2) Before processing, use the confocal axial monitoring modu...

Embodiment 2

[0060] Such as figure 2 As shown, the laser space-time shaping module 18 is composed of a space shaper 28 and a time shaper 29, and adjusts the time domain and space domain parameters of the light beam emitted by the femtosecond laser 17, so as to optimize the femtosecond laser processing performance.

[0061] All the other are identical with embodiment 1.

Embodiment 3

[0063] Such as image 3 As shown, before processing, after the sample 9 is placed on the precision workbench 10, the sample 9 is roughly aligned using the microscopic imaging module 34, and the light emitted by the white light source 32 passes through the illumination system 33, the illumination beam splitter 35, and the dichroic After the color mirror B6 and the objective lens 7, parallel light beams are generated to uniformly irradiate the sample 9, and the illumination light reflected by the sample 9 is reflected by the illumination beam splitter 35 and imaged on the CCD 38 through the imaging lens 37, so that the position and imaging area of ​​the sample 9 can be obtained, and then The inclination and position of the sample 9 can be judged.

[0064] All the other are identical with embodiment 1.

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Abstract

The invention relates to a femtosecond laser processing and monitoring fusion method and device for confocal Raman-LIBS spectrum detection, and belongs to the technical field of laser precision detection and femtosecond laser processing and manufacturing. According to the method and device, a laser confocal axial monitoring module and a femtosecond laser processing system are organically fused, and peak points of confocal system curves are utilized to carry out high-precision in-situ monitoring and sample axial processing size measurement on the axial positions of samples, thereby solving thesample drift problem and the high-precision online detection problem in the measurement process; and a Raman spectrum detection module and an LIBS spectrum detection module are used to monitor and analyze molecular structures, elements and ions of the sample materials after femtosecond laser processing, and above information is fused by a computer, thereby realizing the integration of high-precision micro-structure femtosecond laser processing and micro-morphological property in-situ monitoring and analysis, and improving the controllability of the micro-structure femtosecond laser processingprecision and the processing quality of the samples.

Description

technical field [0001] The invention relates to a femtosecond laser processing monitoring fusion method and device for confocal Raman-LIBS spectral detection, and belongs to the fields of laser precision detection technology and femtosecond laser processing and manufacturing technology. Background technique [0002] Femtosecond laser processing is regarded as a century-old technology that "may cause a new industrial revolution" due to its remarkable advantages such as wide material adaptability, high processing precision, and no mask required, and is regarded as a macro-micro-spanning technology. The preferred method of scale micro-nano manufacturing has been given priority in the development of China, the United States and other major manufacturing countries in the world. [0003] Femtosecond laser processing is to use the nonlinear effect of laser and materials to form and shape materials at the nanometer scale beyond the optical diffraction limit. Its essence is the simul...

Claims

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Application Information

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IPC IPC(8): G01N21/71G01N21/65G01N21/01
CPCG01N21/71G01N21/01G01N21/65G01N21/718
Inventor 王允邱丽荣赵维谦
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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