Device and method for producing high-purity ultrafine spherical silicon micro-powder by means of gas heating

Abstract

The invention discloses a device for producing high-purity ultrafine spherical silicon micro-powder by means of gas heating. The device comprises a micro-powder stock bin, an atomization device, a high-temperature melting furnace, a gathering cooling bin, a finished product bin and a dust removing system, wherein the atomization device comprises an atomizer and a compressed air channel; a discharge hole of the micro-powder stock bin is connected with the atomizer by means of a conduit, and the conduit is connected with the compressed air channel; the upper end of the high-temperature melting furnace is provided with the atomizer, and the lower end of the high-temperature melting furnace is connected with the gathering cooling bin; the lower end of the gathering cooling bin is connected with the finished product bin, and the side face of the lower end of the gathering cooling bin is connected with the dust removing system. The device provided by the invention has the beneficial effectsthat the high-temperature melting furnace is used for melting or gasifying fine particles, the molten or gasified particles are then pelletized by means of gathering cooling, and the power is screenedand collected according to the particle sizes, so that the pelletizing, grading and dust-removing of the silicon micro-powder are realized; the gathering cooling bin adopts the design of a sphericalcrown type upper cover, so that the molten micro-powder is naturally cooled so as to shrink into spheres and is easy to collect; real-time adjustment of the particle size is achieved by controlling the air volume of an induced draft fan, the gas flow rate of compressed air, the particle size of the raw material and the feeding amount.

Description

Technical field [0001] The invention belongs to the field of deep processing of non-metallic minerals, and in particular relates to a device and method for producing spherical silicon micropowder by gas heating. Background technique [0002] In recent years, with the rapid development of microelectronics technology, people have higher and higher requirements for the quality of microelectronic components, making the quality requirements of silicon micropowder higher and higher. 97% of the global integrated circuit (IC) packaging materials use epoxy plastic (EMC), and in the composition of EMC, in addition to the main material, novolac epoxy resin, silicon powder is the most used filler. The silicon powder filler accounts for 70%-90% of the weight of the epoxy molding compound. Therefore, in addition to ultra-fine silicon powder, high purity, and low radioactive elements, for high-quality plastic packaging materials, the particles are also required to be spherical. This is becaus...

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Problems solved by technology

[0007]The disadvantage of this method is: industrial gas -- acetylene gas and natural gas will also bring certain pollution to product quality during the combustion process

[0012] The disadvantage is that the method is only in the laboratory stage and cannot be mass-produced well

[0014] Disadvantages of this method: At present, this method is only in the laboratory stage and cannot be mass-produced well

[0017]Disadvantage of this method: The technology is currently experimental

The disadvantages are: the raw materials are more expensive, the sintering of the particles is poor, the shrinkage is large during drying, and the problem of agglomeration is easy to occur

Disadvantages of this method: At present, this method is only in the laboratory stage, and it cannot be mass-produced well.

Disadvantages of this method: high energy consumption, severe agglomeration of the dried powder, and inconvenient use

[0028] searched Chinese patent literature, and found no direct use of high-purity ultra-fine silicon powder directly atomized into a high-temperature ultra-high temperature melting furnace heated by gas at 2000-2300 ° C to prepare high-purity ultra-fine spherical silicon Reports on the industrial application of micropowder and the use of industrial equipment

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