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Method for laser-assisted polishing of CVD diamond

A laser-assisted and diamond-based technology, which is applied to surface polishing machine tools, grinding/polishing equipment, metal processing, etc., can solve the problems that laser-assisted polishing technology has not been researched, so as to improve polishing efficiency and polishing quality, and improve polishing The effect of surface quality

Active Publication Date: 2019-04-09
NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the laser-assisted processing technology, there is no relevant research on the laser-assisted polishing technology for hard, brittle and difficult-to-machine materials.

Method used

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  • Method for laser-assisted polishing of CVD diamond
  • Method for laser-assisted polishing of CVD diamond
  • Method for laser-assisted polishing of CVD diamond

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] A CVD diamond laser-assisted polishing method, the steps are as follows:

[0030] Adjust the laser ablation parameters, the rotating speed of the rotary table, and the incident angle of the laser to build a polishing platform, and clamp the CVD diamond workpiece 2 on the rotary table 1. The scanning path of the laser beam 4 and the rotation direction of the turntable are as follows: figure 1 As shown in , the turntable rotates counterclockwise while the laser beam translates.

[0031] In the process of laser polishing CVD diamond, such as Figure 4 The schematic diagram of laser ablation diamond is shown, because the surface roughness of CVD diamond before polishing is relatively high, and the laser beam 4 is polished at an incident angle θ (the range of θ is 0° to 85°), which is beneficial to maximize the laser energy density. Improve material removal rate.

[0032] The laser beam is polished along the incident angle, and the protrusion height h of the polished CVD ...

Embodiment 2

[0041] Investigate the relationship between the laser incident angle and the surface roughness after polishing, as the laser incident angle increases, the polished surface roughness tends to decrease, and when the incident angle is greater than 60°, the surface roughness decreases rapidly. Therefore, the present invention chooses The selection range of the incident angle is: 0°-85°, preferably, the incident angle is 45°-85°.

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Abstract

The invention relates to a method for laser-assisted polishing of a CVD diamond. The method comprises the following steps: first, selecting a suitable laser type according to the material property ofthe CVD diamond, and simulating the laser ablation of the CVD diamond so as to acquire suitable laser ablation parameters; then, carrying out laser rough polishing based on optimum laser process parameters; and finally, carrying out mechanical precision polishing by the adoption of a polishing disc till the required precision is achieved, so that a graphitization layer generated during the laser ablation process and surface defects such as microcracks can be removed. Through the method provided by the invention, the problems that the graphitization layer is easy to generate during the laser polishing process of the CVD diamond and the polishing efficiency of the mechanical polishing process is low can be solved.

Description

technical field [0001] The invention relates to the field of polishing hard and brittle materials such as CVD diamond, in particular to the field of CVD diamond laser-assisted polishing. Background technique [0002] CVD (Chemical Vapor Deposition, chemical vapor deposition) diamond material has excellent mechanical, thermal, optical, electrical and thermal properties, and low manufacturing cost, breaking the limit of scarcity of natural diamonds, and has great market value. However, the diamond grains prepared by the CVD process are coarse and the surface roughness is poor (Ra can reach tens of microns), so it needs to be smoothed before use. However, CVD diamond has high hardness and good chemical stability. The traditional mechanical polishing process is not only inefficient, but also easily causes damage to the polished surface. Therefore, how to improve the efficiency of the CVD diamond finishing process and improve the quality of its processed surface has become a key...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B29/02B24B41/06B23P25/00
CPCB23P25/006B24B1/00B24B29/02B24B41/06
Inventor 张全利张振傅玉灿徐九华苏宏华陈燕丁文锋
Owner NANJING UNIV OF AERONAUTICS & ASTRONAUTICS
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