Method for forming protective layers on surface of object and product with protective layers formed on surface

A technology of object surface and protective layer, which is applied in the direction of surface coating liquid device, pretreatment surface, coating, etc., can solve the problem of poor bonding force between the protective polymer layer and the object surface, so as to improve the bonding force and improve the The effect of protecting the lifespan

Inactive Publication Date: 2019-04-26
上海稷以科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the existing technology of forming a protective polymer layer on the surface of an object by using plasma containing a polymer, there are weak ability to prevent the object from being touched by a liquid on the surface, and the bonding force of the protective polymer layer to the surface of the object is poor, etc. question

Method used

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  • Method for forming protective layers on surface of object and product with protective layers formed on surface
  • Method for forming protective layers on surface of object and product with protective layers formed on surface
  • Method for forming protective layers on surface of object and product with protective layers formed on surface

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0114] 100 transistors were placed in the plasma chamber, the chamber was evacuated to a base pressure of 3-10 mTorr, and then helium gas was passed into the chamber at 20 sccm until the pressure reached 80 mTorr. Continuous power plasma was then induced using RF at 13.56 MHz, 300 W for 5 minutes.

[0115] Next, p-trifluorotoluene vapor was introduced into the chamber at a rate of 120 mg / min, and the plasma was switched to the following pulsed plasma: peak power 100 W, frequency 50 Hz, duty cycle 5 %. The ditrifluorotoluene ionizes and reacts with itself to form a continuous and uniform first protective layer on the surface of the transistor. After 15 minutes, the plasma power was turned off and the p-trifluorotoluene vapor supply was stopped.

[0116] Maintain the vacuum in the chamber, introduce 1H,1H,2H,2H-perfluorodecyl acrylate vapor into the chamber at a rate of 120 mg / min, and switch the plasma to the following pulsed plasma: peak The power is 150W, the frequency is ...

Embodiment 2

[0119] 100 transistors were placed in the plasma chamber, the chamber was evacuated to a base pressure of 3-10 mTorr, and then helium gas was passed into the chamber at 20 sccm until the pressure reached 80 mTorr. Continuous power plasma was then induced using RF at 13.56 MHz, 300 W for 5 minutes.

[0120] Next, p-ditrifluorotoluene vapor was introduced into the chamber at a rate of 120 mg / min, and the plasma was switched to the following pulsed plasma: peak power 100 W, frequency 100 Hz, duty cycle 5 %. The ditrifluorotoluene ionizes and reacts with itself to form a continuous and uniform first protective layer on the surface of the transistor. After 15 minutes, the plasma power was turned off and the p-trifluorotoluene vapor supply was stopped.

[0121] Maintain the vacuum in the chamber, introduce hexafluoropropylene vapor into the chamber at a rate of 120 mg / min, and switch the plasma to the following pulsed plasma: the peak power is 100W, the frequency is 100Hz, and the...

Embodiment 3

[0125] 100 knitted gloves were placed in the plasma chamber, the chamber was evacuated to a base pressure of 3-10 mTorr, and then nitrogen gas was passed into the chamber at 20 sccm until the pressure reached 80 mTorr. Continuous power plasma was then induced using RF at 13.56 MHz, 300 W for 5 minutes.

[0126] Next, 1,2,4-trimethylbenzene vapor was introduced into the chamber at a rate of 120 mg / min, and the plasma was switched to the following pulsed plasma: peak power 100 W, frequency 50 Hz, duty cycle The ratio is 25%. The 1,2,4-trimethylbenzene ionizes and reacts with itself to form a continuous and uniform first protective layer on the surface of the transistor. After 15 minutes, the plasma power was turned off and the supply of 1,2,4-trimethylbenzene vapor was stopped.

[0127] Maintain the vacuum in the chamber, introduce 1H,1H,2H,2H-perfluorodecyl acrylate vapor into the chamber at a rate of 120 mg / min, and switch the plasma to the following pulsed plasma: peak The...

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Abstract

The invention provides a method for forming protective layers on the surface of an object. The method comprises the steps that at least part of the surface of the object is exposed in first plasma, sothat the first protective layer is formed on the at least part of the surface of the object; and the at least part of the surface, where the first protective layer is formed, of the object is exposedin second plasma, so that the second protective layer is formed. The invention further provides a product with protective layers formed on the surface. The protective layers include the first protective layer and the second protective layer. The first protective layer is formed on the at least part of the surface of the product by exposing the at least part of the surface of the product in firstplasma. The second protective layer is formed on the outer surface of the first protective layer by exposing the at least part of the surface, where the first protective layer is formed, of the product in second plasma.

Description

technical field [0001] The invention relates to a method for forming a protective layer on the surface of an object and a product with the protective layer formed on the surface. Background technique [0002] In people's production and daily life, it is often necessary to prevent the objects used by them from being touched by liquids (water, oil, aqueous solution or other mixed liquids containing water and oil, etc.), causing the objects to be polluted, wetted, or because of These liquids act to cause damage to objects. Here, the objects people use are products. Examples of products include electrical equipment, electronic equipment, filtration membranes, watches, and wearable products. [0003] In the existing technology of preventing objects from being contacted by liquids, it is disclosed that a protective polymer layer is formed on the surface of objects by using plasma containing polymers. For example, Chinese patent application number CN200780002557 discloses a prote...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D3/14D06M10/08
CPCB05D3/141D06M10/08
Inventor 杨平王俊林捷
Owner 上海稷以科技有限公司
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