High heat dissipation silicon-based package substrate and manufacturing method thereof and high heat dissipation package structure
A technology for encapsulating substrates and manufacturing methods, which is applied in the direction of microstructure technology, microstructure devices, semiconductor/solid-state device manufacturing, etc., which can solve problems such as increased manufacturing costs, increased size of integrated circuit chips, and reliability issues, and achieve low cost , Small size, high integration effect
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[0041] The technical solutions in the embodiments of the invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the invention. Obviously, the described embodiments are only some, not all, embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.
[0042] On the one hand, if figure 1 As shown, the present invention provides a high heat dissipation silicon-based packaging substrate, including a silicon substrate, the silicon substrate is longitudinally provided with a plurality of vertical through holes 9, the vertical through holes 9 run through the upper and lower surfaces of the silicon substrate, and the vertical through holes 9 Electrically conductive and thermally conductive pillars 2 are arranged inside, and both ends of ...
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