Vaporization system and storage medium storing vaporization system program

Abstract

A vaporization system and a storage medium storing a vaporization system program are provided which can properly control liquid material supply without a pressure sensor. The vaporization system (100)includes a vaporizer (21) that vaporizes the liquid material; a supply amount controller (22) that controls the supply amount of the liquid material to the vaporizer (21); a flow rate regulation valve (32) that regulates the flow rate of vaporized gas produced by the vaporizer (21); a flow rate sensor that measures the flow rate of the vaporized gas; and a valve control part (43) that outputs a drive signal to the flow rate regulation valve (32) to control a valve opening level so that a measured flow rate measured by the flow rate sensor becomes equal to a predetermined set flow rate. The system also includes a drive signal value acquiring unit (44) adapted to acquire a drive signal value that is a value indicated by the drive signal; and a supply controller (45) outputting control signals to the supply amount controller (22) based on the drive signal value so as to control supply of the liquid material.

Description

technical field [0001] The present invention relates to a vaporization system for vaporizing a liquid material and a storage medium storing a program for the vaporization system used in the vaporization system. Background technique [0002] Conventionally, as an apparatus for generating gas used in a semiconductor manufacturing process such as a film forming process, as disclosed in Patent Document 1, a vaporization system that vaporizes a liquid material has been used. [0003] Such a gasification system includes a gasification system in which a pressure sensor is provided on a flow path of gasification gas generated by a gasifier to monitor the pressure in the gasifier. Therefore, when the pressure in the vaporizer decreases with the decrease of the liquid material in the vaporizer and falls below a threshold value, supplying the liquid material to the vaporizer prevents the liquid material in the vaporizer from being depleted, or when the gasifier When the pressure gas i...

AI Technical Summary

Problems solved by technology

[0004] However, when a pressure sensor is installed on the gasification gas flow path, it is necessary to make the pressure sensor resistant to high temperature, and this type of pressure sensor is expensive and large, which prevents cost reduction and compactness

[0005] In addition, for example, when performing calibration such as zero point correction of the pressure sensor, there is a problem that the air compressor needs to be cleaned, resulting in poor maintainability

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