Process for vacuum electroplating NI on hard disk to enhance surface roughness

A surface roughness and vacuum electroplating technology, which is applied in vacuum evaporation plating, metal material coating process, sputtering plating, etc., can solve the problems of poor sputtering effect, save cost, facilitate operation, and enhance surface roughness degree of effect

Inactive Publication Date: 2019-05-28
JIANGSU XINSIDA ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although the process and equipment of evaporation platin

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0014] Example 1

[0015] Install the hard disk product on the evaporation coating equipment, put in the evaporation material, and vacuum to 6×10 -3 Pa, ventilation with Ar to 1×10 -1 Pa, 1200W radio frequency discharge for 5 minutes, the Ar gas is fully ionized into an ion state, and the material is energized to evaporate. At the same time, the Ar gas is continuously introduced, and the radio frequency discharge is continued to maintain the vacuum degree at 4×10 -2 Pa, evaporate the Cu material, at an interval of 12 minutes, evaporate the NI material, and open the atmosphere to complete the entire vaporization process.

Example Embodiment

[0016] Example 2

[0017] Install the hard disk product on the evaporation coating equipment, put in the evaporation material, and vacuum to 6×10 -3 Pa, ventilation with Ar to 1×10 -1 Pa, 1200W radio frequency discharge for 5 minutes, the Ar gas is fully ionized into an ion state, and the material is energized to evaporate. At the same time, the Ar gas is continuously introduced, and the radio frequency discharge is continued to maintain the vacuum degree at 4×10 -2 Pa, apply a voltage of 160V, evaporate the Cu material for 140s, at an interval of 12 minutes, evaporate the NI material, and open the atmosphere to complete the entire vaporization process.

Example Embodiment

[0018] Example 3

[0019] Install the hard disk product on the evaporation coating equipment, put in the evaporation material, and vacuum to 6×10 -3 Pa, ventilation with Ar to 1×10 -1 Pa, 1200W radio frequency discharge for 5 minutes, the Ar gas is fully ionized into an ion state, and the material is energized to evaporate. At the same time, the Ar gas is continuously introduced, and the radio frequency discharge is continued to maintain the vacuum degree at 4×10 -2 Pa, add 160V voltage, evaporate the Cu material for 140s, at an interval of 12 minutes, add 85V voltage, evaporate the NI material for 120s, open the atmosphere, and complete the entire steaming process.

[0020] The Ar gas is ionized to clean the surface of the product; the surface of the special hard disk to be processed can be further roughened, which is conducive to the adhesion of the metal. The test result of the 100 grid tape after steaming is 5B.

[0021] Since the RF discharge continues until the material is evapo...

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PUM

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Abstract

The invention discloses a process for vacuum electroplating NI on a hard disk to enhance surface roughness. The process includes the following steps that the hard disk product is installed on an evaporating plating device, and an evaporating material is put in; vacuumizing is performed to 6X10<-3> Pa, and Ar gas is introduced till 1X10<-1> Pa; continuous radio frequency discharging is performed till all the Ar gas is ionized into an ionic state; power-on for material evaporating starts, and meanwhile Ar gas is continuously introduced; continuous radio frequency discharging is performed, and the vacuum degree is kept at 4X10<-2>Pa; and a Cu material evaporates, and a NI material evaporates at the interval of 12 min; and opening to the atmosphere is performed, and the whole evaporating plating process is completed. The process for vacuum electroplating NI on the hard disk to enhance the surface roughness utilizes the evaporating plating device, uses the principle of sputtering coating for reference, is superior to sputtering coating in performance, and is equivalent to evaporating plating in cost.

Description

Technical field [0001] The invention belongs to the technical field of painting and vacuum coating, and particularly relates to a process for enhancing the surface roughness of vacuum plating NI on a hard disk. Background technique [0002] If the product design process needs to achieve the effect of internal and external shielding, chemical plating, direct spraying of conductive paint, evaporation coating, sputtering, use of the conductivity of carbon fiber, direct injection of conductive materials, and direct use of metal shells can be adopted. However, in terms of comprehensive environmental protection, the most important indicator of which is the best way to conduct electricity is mainly three kinds: direct use of metal casing, evaporation and sputtering. [0003] The direct use of a metal shell is costly, especially for products with more complex shapes and more empty columns, which is difficult to achieve. From various cost-effective comparisons, sputtering and evaporation a...

Claims

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Application Information

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IPC IPC(8): C23C14/32C23C14/14C23C14/16
Inventor 王寒骁郭高建
Owner JIANGSU XINSIDA ELECTRONICS CO LTD
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