Bulk silicon mems waveguide combining method for spatial wave mixing in terahertz band

Abstract

The invention relates to a bulk silicon MEMS waveguide combining method for space wave mixing in terahertz frequency band, and belongs to the technical field of terahertz wave mixing receiving front-end. The method introduces bulk silicon MEMS technology to manufacture a terahertz local oscillator signal receiving antenna, a terahertz signal receiving antenna to be measured and a waveguide duplexer. The waveguide duplexer superimposes the received terahertz local oscillator signal and the electrical signal of the signal to be measured, and outputs the waveguide input to the terahertz mixer through the waveguide duplexer, and at the same time isolates the terahertz local oscillator signal receiving antenna from the terahertz receiver. Test signal receiving antenna. This method replaces the optical splitter film combining method with obvious loss in the common terahertz space wave mixing system under the situation that both the terahertz local oscillator signal and the signal to be measured are in the form of space radiation waves; it realizes the integration and integration of system design. to improve the receiving sensitivity of the system.

Description

technical field [0001] The invention relates to a bulk silicon MEMS waveguide combining method for space wave mixing in terahertz frequency band, and belongs to the technical field of terahertz wave mixing receiving front-end. Background technique [0002] The terahertz frequency band is between the millimeter wave and the far-infrared wave, and the technology in this frequency band is a technology that has not been fully explored and studied between the mature microwave electronics and optics. Terahertz waves have the characteristics of spectral resolution, safety, perspective, transient and broadband, and are of increasing importance to the fields of physics, chemistry, biology, electronics, radio astronomy, etc. A series of applications such as rapid detection of THz spectrum, high-speed communication, and terahertz radar. [0003] Terahertz coherent detection technology is similar to the superheterodyne technology in traditional microwave communication, in which the mix...

AI Technical Summary

Problems solved by technology

In order to improve the receiving efficiency of the signal to be tested, it is necessary to increase the light transmittance of the spectroscopic film and reduce the reflectivity, and the two cannot have both

In turn, the power of the input local oscillator signal is small, which affects the sensitivity of the receiving system and reduces the detection ability of the weak signal to be tested.

Images