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Standard sample preparation method for synchronous radiation confocal fluorescence experiment

A confocal and fluorescent technology, which is applied in the direction of material analysis using radiation, material analysis using wave/particle radiation, and measuring devices, can solve problems such as error effects and achieve high-precision results

Active Publication Date: 2019-06-04
SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

If the confocal microelement scale is large, this error can be ignored, but if you want to get a small confocal microelement, the error caused by this traditional standard will have a great impact

Method used

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  • Standard sample preparation method for synchronous radiation confocal fluorescence experiment
  • Standard sample preparation method for synchronous radiation confocal fluorescence experiment
  • Standard sample preparation method for synchronous radiation confocal fluorescence experiment

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Embodiment Construction

[0023] Below in conjunction with the drawings, preferred embodiments of the present invention are given and described in detail.

[0024] see Figure 1-4 , the present invention, that is, a method for preparing a standard sample for synchrotron radiation confocal fluorescence experiments, comprising the following steps:

[0025] Step S101, deposit a copper film 12 with a thickness of 5-20 nm (preferably 5 nm) on the entire top surface of the silicon substrate 11 by magnetron sputtering, molecular beam epitaxy, etc., and place the silicon film 12 with the copper film 12 The substrate 11 is cut into a length of 3-7mm (preferably 5mm), and a width of 0.8-1.2mm (preferably 1mm); (such as figure 1 shown)

[0026] Step S102, etching the copper film 12 and the silicon substrate 11 with a partial thickness adjacent to the copper film 12 by ion beam etching, so that their widths are reduced to form a copper film with a width of 50-200 μm (preferably 100 μm) Strip 13 and first substr...

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Abstract

The invention relates to a standard sample preparation method for a synchronous radiation confocal fluorescence experiment. The method comprises the steps that S101 a copper film is deposited on the entire top surface of a silicon substrate, and the silicon substrate with the copper film is cut; S102 the copper film and the silicon substrate with partial thickness are etched to form a copper stripand a first substrate part, wherein the silicon substrate is adjacent to the copper film; and S103 the copper strip and the first substrate part are etched to form a copper strap and a second substrate part. A standard sample prepared by the invention is convenient for more accurate calibration of devices in the synchronous radiation confocal fluorescence experiment, and the accuracy of confocalmicro-element calibration is improved.

Description

technical field [0001] The invention relates to a standard sample preparation method for synchrotron radiation confocal fluorescence experiments Background technique [0002] X-ray fluorescence analysis method is a qualitative and quantitative method that can determine the elemental composition in substances. It is widely used in biology, materials, geology, archaeology, environment and other disciplines. It has the advantages of sensitivity, non-destructive and atmospheric environment. However, in conventional fluorescence experiments, there is no depth spatial resolution capability. The three-dimensional spatial distribution information of the substance can be provided by the X-ray confocal experimental method. [0003] The X-ray confocal experimental method was proposed by Gibson and Kumakhov in 1992, and the first X-ray confocal experimental device appeared in 2000. Most of the current confocal experimental devices are based on laboratory X-rays, which have low brightn...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/223G01N23/04
Inventor 闫帅张丽丽王华常广才岳帅鹏杨一鸣
Owner SHANGHAI INST OF APPLIED PHYSICS - CHINESE ACAD OF SCI