Multipurpose metal film layer vacuum coating production line

Abstract

The invention discloses a multipurpose metal film layer vacuum coating production line. The production line comprises an inlet chamber, an inlet buffer chamber, an inlet conveying chamber, a sputtering chamber, an outlet conveying chamber, an outlet buffer chamber, an outlet chamber and a quality inspection chamber, wherein the inlet chamber, the inlet buffer chamber, the inlet conveying chamber,the sputtering chamber, the outlet conveying chamber, the outlet buffer chamber and the outlet chamber are connected in sequence; transferring rollers connected with each other are arranged in the inlet chamber, the inlet buffer chamber, the inlet conveying chamber, the sputtering chamber, the outlet conveying chamber, the outlet buffer chamber and the outlet chamber; a film coating quality inspection roller and a quality inspection system are arranged in the quality inspection chamber; the transferring roller in the outlet chamber is connected with the film coating quality inspection roller;and the transferring rollers and the film coating quality inspection roller are used for transferring a film coating substrate. According to the multipurpose metal film layer vacuum coating productionline, mass and low-cost production of various coatings are achieved with high sputtering deposition rate and strong process universality; an element diffusion path is short with no intermediate product and no element evaporation, so that the preparation speed and the efficiency are high, the yield is 95% or above, and the production line is particularly suitable for large-scale industrial production.

Description

technical field [0001] The invention relates to a multipurpose metal film layer vacuum coating production line, belonging to the technical field of vacuum coating. Background technique [0002] Vacuum coating technology first appeared in the 1930s, industrial applications began to appear in the 1940s and 1950s, and industrial mass production began in the 1980s. It has been widely used in electronics, aerospace, packaging, decoration, hot stamping and printing industries. Vacuum coating technology is a novel new technology of material synthesis and processing, and is an important part of the field of surface engineering technology. Vacuum coating technology is to use physical and chemical means to coat the solid surface with a layer of coating with special properties, so that the solid surface has wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic conductivity, insulation and decora...

AI Technical Summary

Problems solved by technology

However, the degree of vacuum directly affects the structure and performance of the film. If the degree of vacuum is low, the material will be seriously polluted by residual gas molecules, and the performance of the film will deteriorate. Increasing the substrate temperature is conducive to the desorption of gas molecules.

[0004] With the rapid development of coating technology in the field of vacuum coating, the requirements for coating products are getting higher and higher. Therefore, more and more improvements have occurred in the coating production line, and the requirements of the production line have increased accordingly. The overall stability of the coating production line in the prior art Sexuality and coating uniformity, low production efficiency and high equipment cost

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