ZnO nanocluster gas-sensitive sensor taking FTO conductive glass as electrode element

A gas sensor and electrode element technology, applied in the direction of material resistance, etc., can solve the problems of poor contact between materials and electrodes, uneven coating thickness, damage to material morphology, etc., to overcome easily damaged material morphology and production costs The effect of low and high sensitivity

Inactive Publication Date: 2019-06-21
SHANDONG UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The invention uses photolithographically processed FTO conductive glass as the gas-sensing electrode element, which is beneficial to the in-situ growth of the gas-sensing material and the enhancement of device stability; the ZnO nano-cluster array with a large aspect ratio provides a large specific surface area and direct The electron transport channel is conducive to significantly improving the gas-sensing performance of the material; by growing the gas-sensing material on the gas-sensing electrode element in situ, it overcomes the easily damaged material morphology and the coating method in the traditional gas-sensing test. Disadvantages such as uneven coating thickness, poor contact between materials and electrodes, easy agglomeration of materials, and easy oxidation of electrodes

Method used

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  • ZnO nanocluster gas-sensitive sensor taking FTO conductive glass as electrode element
  • ZnO nanocluster gas-sensitive sensor taking FTO conductive glass as electrode element
  • ZnO nanocluster gas-sensitive sensor taking FTO conductive glass as electrode element

Examples

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Effect test

Embodiment 1

[0035] Example 1, the preparation process of in-situ growth of ZnO nano-clusters using photolithographically processed FTO conductive glass as electrode components and the test of their gas-sensing properties.

[0036] The preparation process of the gas sensor is carried out according to the following steps:

[0037] (1) Take 0.05 M zinc acetate dihydrate, 0.05 M ethylene glycol amine and appropriate amount of absolute ethanol solution to prepare the seed layer solution;

[0038] (2) Use a self-made lifting motor to move the electrode element into and out of the seed layer solution twice at a speed of 1-3 mm / s, then dry the electrode element at room temperature overnight, and then put it in a muffle furnace at 5 ℃ / The heating rate of min was annealed at 400 °C for 10 min, and the above process was repeated twice to obtain a uniform ZnO seed layer;

[0039] (3) Take 0.05 M zinc nitrate hexahydrate compound, 0.055 M hexamethylenetetramine, 0.018 M polyethyleneimine (molecular we...

Embodiment 2

[0043] Example 2, the preparation process of in-situ growth of ZnO nano-clusters using FTO conductive glass with a lithography stripe spacing of 30 μm as the electrode element and its gas-sensing performance test.

[0044] The preparation process of the gas sensor is carried out according to the following steps:

[0045] (1) Take 0.05 M zinc acetate dihydrate, 0.05 M ethylene glycol amine and appropriate amount of absolute ethanol solution to prepare the seed layer solution;

[0046] (2) Use a self-made lifting motor to move the electrode element into and out of the seed layer solution twice at a speed of 1 mm / s, then dry the electrode element overnight at room temperature, and then put it into a muffle furnace at a rate of 5 °C / min The heating rate was annealed at 400°C for 10 minutes, and the above process was repeated twice to obtain a uniform ZnO seed layer;

[0047] (3) Take 0.05 M zinc nitrate hexahydrate compound, 0.055 M hexamethylenetetramine, 0.018 M polyethyleneimi...

Embodiment 3

[0050] Example 3, using FTO conductive glass with a lithographic stripe spacing of 30 μm as the electrode element, and changing the pulling speed during the preparation of the ZnO seed layer, the preparation process of growing ZnO nanoclusters and the gas-sensing performance test.

[0051] The preparation process of the gas sensor is carried out according to the following steps:

[0052] (1) Take 0.05 M zinc acetate dihydrate, 0.05 M ethylene glycol amine and appropriate amount of absolute ethanol solution to prepare the seed layer solution;

[0053] (2) Use a self-made lifting motor to move the electrode element into and out of the seed layer solution twice at a speed of 3 mm / s, then dry the electrode element at room temperature overnight, and then put it into a muffle furnace at a speed of 5 ℃ / min The heating rate was annealed at 400 °C for 10 minutes, and the above process was repeated twice to obtain a uniform ZnO seed layer;

[0054] (3) Take 0.05 M zinc nitrate hexahydr...

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Abstract

The invention relates to a ZnO nanocluster gas-sensitive sensor with FTO conductive glass subjected to laser etching treatment as an electrode element, and belongs to the technical field of gas sensors. The gas-sensitive sensor consists of two parts, namely a gas-sensitive electrode element and a gas-sensitive material, and is characterized in that the gas-sensitive electrode element is obtained by carrying out laser etching treatment on the FTO conductive glass with the specific pattern and line width, the etched pattern is in an interdigital shape, the width of interdigital stripes is 300-500 mum, and the interval of the interdigital stripes is 20-80 mum; the gas-sensitive material is a ZnO nano-cluster array of a hexagonal wurtzite structure, the diameter of a nanowire is 70-100 nm, andthe length of the nanowire is 2-3.5 mum. The FTO gas-sensitive electrode element has the advantages of low cost, good stability, easiness in in-situ growth of the gas-sensitive material and the like;the sensor has the advantages of low cost, simple process, excellent gas sensitivity, good stability and the like, shows excellent response capability to gases such as ethanol, methanol, hydrogen sulfide and the like, and is a novel gas-sensitive sensor with wide development and application prospects.

Description

technical field [0001] The invention relates to a ZnO nano-cluster gas sensor using photolithographically processed FTO conductive glass as an electrode element, belonging to the technical field of gas sensors. Background technique [0002] As we all know, excessive toxic, harmful and flammable and explosive gases will cause serious environmental pollution and endanger human health. At present, major accidents caused by toxic, harmful and flammable and explosive gases are common occurrences, which have caused a large number of casualties and property losses. How to realize the real-time monitoring of dangerous gases, thereby avoiding the occurrence of potential safety accidents, and providing early guarantee for the subsequent treatment of dangerous gases has become a major problem and technical challenge facing the current society. [0003] In recent years, chemical resistive gas sensors based on semiconductor metal oxide materials have been widely used in industrial manuf...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/12
Inventor 尹广超赵国栋孙美玲
Owner SHANDONG UNIV OF TECH
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