Preparation method of multicomponent complex carbide coating
A multi-component composite and carbide technology, applied in coatings, metal material coating processes, gaseous chemical plating, etc., can solve problems such as poor oxidation resistance, achieve excellent stability, accurate stoichiometric ratio, and ultra-high temperature resistance. Excellent ablative performance
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Embodiment 1
[0031] A method for preparing a multi-component composite carbide coating, comprising the following steps in sequence, wherein, for the specific structure of the chemical vapor deposition system used, refer to the attached figure 1 :
[0032] (1) In an argon protective glove box, put TaCl 5 , HfCl 4 and ZrCl 4 Mix the powder and fill it into an alumina crucible; where TaCl 5 , HfCl 4 and ZrCl 4 Prepared at 55%, 35% and 10% respectively by mass percentage;
[0033] (2) Place the substrate sample on the support of the deposition furnace, and feed argon gas with a flow rate of 200ml / min into the deposition furnace for 30 minutes to remove the air in the furnace; then heat the deposition furnace at a heating rate of 5-20°C / min Reach a deposition temperature of 1300°C;
[0034] (3) will contain TaCl 5 , HfCl 4 and ZrCl 4 The crucible of mixed powder is placed on the lifting support in the low temperature zone of the dual temperature zone gasifier, and the lifting support is...
Embodiment 2
[0039] A method for preparing a multi-component composite carbide coating, comprising the following steps in turn, wherein the structure of the chemical vapor deposition system used is the same as in Example 1:
[0040] (1) In an argon protective glove box, put TaCl 5 , HfCl 4 and ZrCl 4 Mix the powder and fill it into an alumina crucible; where TaCl 5 , HfCl 4 and ZrCl 4 Prepared by mass percentage as 75%, 20% and 5% respectively;
[0041] (2) Place the substrate sample on the support of the deposition furnace, and feed argon gas with a flow rate of 200ml / min into the deposition furnace for 30 minutes to remove the air in the furnace; then heat the deposition furnace at a heating rate of 5-20°C / min Reach a deposition temperature of 1400°C;
[0042] (3) will contain TaCl 5 , HfCl 4 and ZrCl 4 The crucible of mixed powder is placed on the lifting support in the low temperature zone of the dual temperature zone gasifier, and the lifting support is raised so that the mou...
Embodiment 3
[0047] A method for preparing a multi-component composite carbide coating, comprising the following steps in turn, wherein the structure of the chemical vapor deposition system used is the same as in Example 1:
[0048] (1) In an argon protective glove box, put TaCl 5 , HfCl 4 and ZrCl 4 Mix the powder and fill it into an alumina crucible; where TaCl 5 , HfCl 4 and ZrCl 4 Prepared as 60%, 30% and 10% respectively by mass percentage;
[0049] (2) Place the substrate sample on the support of the deposition furnace, and feed argon gas with a flow rate of 200ml / min into the deposition furnace for 30 minutes to remove the air in the furnace; then heat the deposition furnace at a heating rate of 5-20°C / min Reach a deposition temperature of 1400°C;
[0050] (3) will contain TaCl 5 , HfCl 4 and ZrCl 4 The crucible of mixed powder is placed on the lifting support in the low temperature zone of the dual temperature zone gasifier, and the lifting support is raised so that the mo...
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