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CORROSION-RESISTANT CuZn ALLOY

A corrosion resistance and alloy technology, applied in the field of corrosion resistance CuZn alloy, can solve the problems of accelerated electrode life, reduction, plasma arcing, etc., and achieve the effect of avoiding the increase of the number of steps

Active Publication Date: 2019-07-23
JX NIPPON MINING & METALS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The corrosion of the electrode will form corrosion points, which will cause arcing in the plasma, and accelerate the reduction of the life of the electrode.

Method used

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  • CORROSION-RESISTANT CuZn ALLOY
  • CORROSION-RESISTANT CuZn ALLOY
  • CORROSION-RESISTANT CuZn ALLOY

Examples

Experimental program
Comparison scheme
Effect test

manufacture example 1

[0103] Production example 1 (embodiment)

[0104] A CuZn alloy was produced in the following manner.

[0105] As raw materials, the following Cu raw materials and Zn raw materials were prepared.

[0106] Cu raw material: high-purity metal copper (6N) (purity 99.9999%)

[0107] Zn raw material: high-purity metal zinc (4N5) (purity 99.995%)

[0108] Make this raw material Cu 28.35kg and raw material Zn 17.15kg carry out vacuum melting (condition: vacuumize to 10 -1 After Pa is set to an Ar 400torr environment, and kept at 1050°C for 30 minutes), a high-purity CuZn alloy is obtained. The shrinkage cavity (shrinkage cavity) in the upper part of the ingot was removed from the obtained CuZn alloy, and it was forged to φ132, length 275 mm, and weight 31.5 kg.

[0109] Forging is performed with the preheating temperature set at 850°C for 3 hours, after the initial φ135 → to φ130, reheating at 850°C for more than 10 minutes at each stage, and φ130 → 80mm square → 50mm square → 4 pi...

manufacture example 2

[0114] Production example 2 (comparative example)

[0115] A Cu raw material and a Zn raw material were prepared in the same manner as in Production Example 1, these raw materials were vacuum melted to obtain a high-purity CuZn alloy, and hot forging was performed. The hot-forged high-purity CuZn alloy was finished under the same conditions as in Production Example 1 without performing hot isostatic pressing (HIP processing) to obtain a high-purity CuZn rod (high-purity product) (sample 2) . An explanatory diagram of the procedure of Production Example 2 is shown in figure 2 .

manufacture example 3

[0116] Production example 3 (comparative example)

[0117] A CuZn alloy was produced in the following manner.

[0118] As raw materials, the following Cu raw materials and Zn raw materials were prepared.

[0119] Cu raw material: metal copper billet (4N) (purity 99.99%)

[0120] Zn raw material: metal zinc billet (3N) (purity 99.9%)

[0121] 28.35 kg of the raw material Cu and 17.15 kg of the raw material Zn were melted in the atmosphere (conditions: 1050° C., held for 30 minutes) to obtain a CuZn alloy. The shrinkage cavity in the upper part of the ingot was removed from the obtained CuZn alloy, and an ingot having a diameter of 132, a length of 248 mm, and a weight of 28.4 kg was extruded.

[0122]Extrusion was performed using a die of φ40 so that the finished diameter became approximately φ41 while heating to 700°C. The extrusion pressure at this time is 150~170kg / cm 2 . Four alloy rods (sample 3) were obtained by cutting at intervals of 650 mm from the discharge side...

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Abstract

Provided is a corrosion-resistant CuZn alloy comprising 15-55 mass% of Zn and the remainder including Cu and inevitable impurities, wherein the total amount of the Zn content and the Cu content is 99.995 mass% or more, and the number of pores is 1 / cm2 or less, as observed with an optical microscope.

Description

technical field [0001] The present invention relates to a corrosion-resistant CuZn alloy that can be suitably used as an alloy for electrodes used in an acidic environment. Background technique [0002] Pulsed laser light has recently been used in photolithography of integrated circuits. The pulsed laser light can be generated by applying a gas discharge between a pair of electrodes with a very short discharge and a very high voltage in a gas discharge medium. For example, in an ArF laser system, a fluorine-containing plasma is generated between a pair of electrodes during operation. Fluorine-containing plasmas are very corrosive to metals. As a result, the electrodes corrode over time during the operation of the pulsed laser generator. The corrosion of the electrode will form corrosion points, which will cause arcing in the plasma, and then accelerate the reduction of the life of the electrode. As an electrode, for example, a CuZn alloy is used. [0003] As a technolog...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C22C9/04C22C18/02C22F1/02C22F1/08C22F1/16H01S3/038C22F1/00
CPCC22C9/04C22C18/02C22F1/02C22F1/08Y02E60/10C22F1/165H01S3/0388H01S3/2251H01S3/2256H01M4/244C21D8/06C22C1/02C22F1/00
Inventor 高畑雅博
Owner JX NIPPON MINING & METALS CORP