Unlock instant, AI-driven research and patent intelligence for your innovation.

High-entropy amorphous film and preparation method and application

An amorphous thin film, high-entropy technology, applied in ion implantation plating, metal material coating process, coating and other directions, can solve the problems of high maintenance cost, rising maintenance cost, acid corrosion resistance, etc., and improve the elastic modulus , The effect of improving fatigue life and good corrosion resistance

Active Publication Date: 2019-08-09
JIANGSU UNIV OF TECH
View PDF3 Cites 8 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0007] In order to solve the technical problems of short service life and high maintenance cost caused by the parts of industrial equipment not resistant to acid corrosion, for example, the parts of hydrochloric acid synthesis furnace often have short service life and high maintenance cost due to corrosion, and provide a A kind of high-entropy amorphous thin film and its preparation method, and its application on the surface anticorrosion of industrial equipment parts, especially the application of surface anticorrosion on the parts of hydrochloric acid synthesis furnace

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • High-entropy amorphous film and preparation method and application
  • High-entropy amorphous film and preparation method and application
  • High-entropy amorphous film and preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] The preparation method of the high-entropy amorphous film of the present embodiment is as follows:

[0033] (1) Target material preparation: use high-purity CoCrFeMnNi alloy with a purity of 99.99%, heat preservation at 1000°C, and homogenization treatment for 2 hours as the target material;

[0034](2) Substrate preparation: After polishing the 304 stainless steel substrate, ultrasonically clean it in acetone, alcohol and deionized water for 15 minutes to remove impurities and dirt on the surface, fix the substrate on a circular baffle and send it into the sample chamber, and vacuumize it. Vacuum degree≤5×10 -5 Pa;

[0035] (3) Pre-sputtering: in the sputtering chamber with a power of 100W and a vacuum degree of ≤2.5×10 -6 Pa, argon flow rate 20sccm, and working pressure 0.4Pa, pre-sputter for 30 minutes to clean the impurities and oxides on the surface of the target. During the pre-sputtering process, observe the color of the plasma through the eyepiece, and the col...

Embodiment 2

[0043] The preparation method of the high-entropy amorphous film of the present embodiment is as follows:

[0044] (1) Target material preparation: use high-purity CoCrFeMnNi alloy with a purity of 99.99%, heat preservation at 1000°C, and homogenization treatment for 2 hours as the target material;

[0045] (2) Substrate preparation: After polishing the 304 stainless steel substrate, ultrasonically clean it in acetone, alcohol and deionized water for 15 minutes to remove impurities and dirt on the surface, fix the substrate on a circular baffle and send it into the sample chamber, and vacuumize it. Vacuum degree≤5×10 -5 Pa;

[0046] (3) Pre-sputtering: in the sputtering chamber with a power of 100W and a vacuum degree of ≤2.5×10 -6 Pa, argon flow rate 20sccm, and working pressure 0.4Pa, pre-sputter for 30 minutes to clean the impurities and oxides on the surface of the target. During the pre-sputtering process, observe the color of the plasma through the eyepiece, and the co...

Embodiment 3

[0054] The preparation method of the high-entropy amorphous film of the present embodiment is as follows:

[0055] (1) Target material preparation: use high-purity CoCrFeMnNi alloy with a purity of 99.99%, heat preservation at 1000°C, and homogenization treatment for 2 hours as the target material;

[0056] (2) Substrate preparation: After polishing the 304 stainless steel substrate, ultrasonically clean it in acetone, alcohol and deionized water for 15 minutes to remove impurities and dirt on the surface, fix the substrate on a circular baffle and send it into the sample chamber, and vacuumize it. Vacuum degree≤5×10 -5 Pa;

[0057] (3) Pre-sputtering: in the sputtering chamber with a power of 100W and a vacuum degree of ≤2.5×10 -6 Pa, argon flow rate 20sccm, and working pressure 0.4Pa, pre-sputter for 30 minutes to clean the impurities and oxides on the surface of the target. During the pre-sputtering process, observe the color of the plasma through the eyepiece, and the co...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

Through introduction of a nonmetal element N in CoCrFeMnNi with equal atomic ratio, a high-entropy alloy film with chemical components and atomic ratios of CoCrFeMnNiN (0.35-0.75) is prepared througha magnetron sputtering method; the high-entropy alloy film prepared by the method is of an amorphous structure; the hardness value can reach 14-18 GPa; the elastic modulus can reach 170-190 GPa; the fatigue life is more than 12*104 cycles; the prepared high-entropy amorphous film has no surface change after dipping in 36-38% of concentrated hydrochloric acid (wt%) and 98% of concentrated sulfuricacid (wt%) by 180 days; and after introduction of the element N, the hardness, the elastic modulus and the fatigue life are improved to a certain extent, the excellent corrosion resistance is achieved, and the high-entropy amorphous film can be applied to the surfaces of parts of industrial equipment, in particular hydrochloric acid synthetic furnace equipment.

Description

technical field [0001] The invention relates to the technical field of alloy thin films and their preparation, in particular to a high-entropy amorphous thin film and its preparation method, as well as the application of surface protection on parts of industrial equipment, especially hydrochloric acid synthesis furnaces. Background technique [0002] The hydrochloric acid synthesis furnace is the hydrogen chloride synthesis furnace. The outlet pipe part is reduced by multiples due to the diameter of the hydrogen chloride gas in the furnace. Usually, it is only 1 / 10 of the diameter of the furnace body and 1 / 4 of the diameter of the furnace top. The temperature is 350 ~ 450 ° C. High-temperature erosion and corrosion intensify, causing perforation and leakage of the outlet pipe. Thermal oxidation in the air produces ferric oxide, which makes the furnace wall thinner and thinner. On the other hand, because the raw material gas contains a small amount of oxygen, water is generat...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C23C14/16C23C14/35
CPCC23C14/165C23C14/35
Inventor 王泽姚远远彭涛仇建国吴建珍杨桂东杨晓红李小平卢雅琳雷卫宁孙志娟叶霞
Owner JIANGSU UNIV OF TECH