A kind of coating method for growing second generation high temperature superconducting tape barrier layer composite film
A technology of high-temperature superconducting tape and barrier layer, which is applied in the usage of superconducting elements, superconducting devices, superconducting/high-conducting conductors, etc., to reduce equipment costs, reduce system components, and increase the coating area.
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[0083] Example 1
[0084] This embodiment provides a coating method for grown a second generation high temperature superconducting strip barrier layer composite film, including the following steps:
[0085] Step 1: Load the baseband that has been electrobed to the vacuum chamber and wraps around the roller and drum multiple times;
[0086] One of the baseband is a nickel-tungsten alloy, the Hastel alloy or stainless steel metal baseband; since the roller structure is used, the system has a small friction, the number of windings is increased than the water-free board structure, and the present invention is wound into 25 times;
[0087] Step 2: Pump the vacuum to 1.0 * e -5 Torr or less, enter the process gas, set the process pressure;
[0088] The process gas is argon and oxygen, the process pressure controls by a shutter valve, and the pressure is from 1 to 10 mTorr;
[0089] In this implementation case, the process pressure is 4 mTorr, and the flow meter of process gas flow is con...
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