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Method for preparing Y+Y2O3/Y2O3 composite coating through atmospheric plasma spraying technology

A composite coating, plasma technology, applied in the coating, metal material coating process, melt spraying and other directions, can solve the problems of lateral cracks in the outer layer of the coating, high cost, quality needs to be further improved, etc., to achieve high deposition efficiency Effect

Pending Publication Date: 2019-11-05
INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When depositing a coating, it is usually necessary to heat the yttrium oxide ceramic powder to a molten or semi-molten state, the conditions are harsh, and the cost is relatively expensive
If the process parameters are not selected properly, the prepared coating will have lateral cracks in the outer layer, which is not dense enough, and the quality needs to be further improved

Method used

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  • Method for preparing Y+Y2O3/Y2O3 composite coating through atmospheric plasma spraying technology

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] In this example, the IC equipment plasma etching chamber protective coating is prepared on the 6061 alloy substrate, that is, the atmospheric plasma spraying technology is in Y+Y 2 o 3 The specific steps of coating preparation method are as follows:

[0029] (1) Weigh 20g of pure Y powder and 160g of Y 2 o 3 Powder, dry for subsequent use after mixing; Weigh 100g high-purity (purity 99.99wt%) Y 2 o 3 powder, dry for later use.

[0030] (2) Pretreat the surface of the sprayed substrate, which specifically includes the following steps: use acetone and alcohol to pretreat the surface of the sprayed substrate respectively, and sandblasting. The sandblasting medium used is white corundum, and the particle size range is 50 ~ 100 μm. With the micron grade Y+Y prepared in step (1) 2 o 3 Mixed powder, prepared Y+Y on 6061 alloy substrate by atmospheric plasma spraying technology 2 o 3 Composite coating, about 80 μm thick.

[0031] Among them, the atmospheric plasma sp...

Embodiment 2

[0037] In this example, the IC equipment plasma etching chamber protective coating is prepared on the 6061 alloy substrate, that is, the atmospheric plasma spraying technology is in Y+Y 2 o 3 The specific steps of coating preparation method are as follows:

[0038] (1) Weigh 30g of pure Y powder and 120g of Y 2 o 3 Powder, mixed and dried for later use. Weigh 50g high-purity (purity 99.99wt%) Y 2 o 3 powder, dry for later use.

[0039] (2) Pretreat the surface of the sprayed substrate, which specifically includes the following steps: use acetone and alcohol to pretreat the surface of the sprayed substrate respectively, and sandblasting. The sandblasting medium used is white corundum, and the particle size range is 50 ~ 100 μm. With the micron grade Y+Y prepared in step (1) 2 o 3 Mixed powder, prepared Y+Y on 6061 alloy substrate by atmospheric plasma spraying technology 2 o 3 Composite coating, about 100 μm thick.

[0040] Among them, the atmospheric plasma sprayin...

Embodiment 3

[0046] In this example, the IC equipment plasma etching chamber protective coating is prepared on the 6061 alloy substrate, that is, the atmospheric plasma spraying technology is in Y+Y 2 o 3 The specific steps of coating preparation method are as follows:

[0047] (1) Weigh 20g of pure Y powder and 160g of Y 2 o 3 Powder, dry for subsequent use after mixing; Weigh 60g high-purity (purity 99.99wt%) Y 2 o 3 powder, dry for later use.

[0048] (2) Pretreat the surface of the sprayed substrate, which specifically includes the following steps: use acetone and alcohol to pretreat the surface of the sprayed substrate respectively, and sandblasting. The sandblasting medium used is white corundum, and the particle size range is 50 ~ 100 μm. With the micron grade Y+Y prepared in step (1) 2 o 3 Mixed powder, prepared Y+Y on 6061 alloy substrate by atmospheric plasma spraying technology 2 o 3 Composite coating, about 80 μm thick.

[0049] Among them, the atmospheric plasma spr...

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Abstract

The invention relates to the technical field of preparation of a ceramic coating, in particular to a method for preparing a Y+Y2O3 / Y2O3 composite coating through an atmospheric plasma spraying technology. The method comprises the following step that (1) Y2O3 powder and Y powder with the purity larger than 99.9wt% are selected, proportioned and mixed; (2) the surface of a sprayed sample is preprocessed; (3) the surface of a matrix is sprayed through the atmospheric plasma spraying technology to prepare a Y+Y2O3 coating as a middle transition layer; (4) a high-purity Y2O3 coating is deposited onthe outer layer of the Y+Y2O3 coating through the atmospheric plasma spraying technology to form the Y+Y2O3 coating / Y2O3 composite coating; and (5) the Y+Y2O3 / Y2O3 composite coating obtained after plasma spraying is roasted in a vacuum environment at the temperature of 160-180 DEG C for 4-6 hours. The prepared Y+Y2O3 / Y2O3 composite coating is compact in structure, the porosity is low and ranges from 0.5% to 2%, and the bonding strength of the coating and the matrix reaches 30-70 MPa.

Description

technical field [0001] The invention relates to the technical field of preparation of ceramic coatings, in particular to an atmospheric plasma spraying technique for preparing Y+Y 2 o 3 / Y 2 o 3 The method of composite coating is suitable for protective coating of IC equipment plasma etching cavity. Background technique [0002] In previous studies, thermal spraying technology was often used to prepare yttrium oxide coatings as protective coatings on the inner surfaces of key parts of IC equipment. When depositing a coating, it is usually necessary to heat the yttrium oxide ceramic powder to a molten or semi-molten state, which is harsh and expensive. If the process parameters are not selected properly, the prepared coating will have lateral cracks in the outer layer, which is not dense enough, and the quality needs to be further improved. [0003] The current international trend is to study yttria and yttria-stabilized zirconia ceramic coatings to improve the overall p...

Claims

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Application Information

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IPC IPC(8): C23C4/134C23C4/06
CPCC23C4/06C23C4/134
Inventor 崔新宇沈艳芳李宁王吉强熊天英
Owner INST OF METAL RESEARCH - CHINESE ACAD OF SCI
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