Novel laser polarization phase shift interference tomography measuring device and method
A phase-shift interference and measurement device technology, applied in the field of measurement, can solve the problems of increasing adjustment difficulty, the phase modulation range cannot be very large, and the optical path structure is complex, and achieves high phase detection accuracy, good anti-interference ability, and elimination of leakage factors. the effect of
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Embodiment 1
[0031] refer to figure 1 , the preferred embodiment 1 of the present invention provides a novel laser polarization phase-shift interference tomography measurement device, which includes the following components:
[0032] Laser 101: a common commercial He-Ne laser with an output wavelength of 633nm and a beam diameter of about Ф4mm;
[0033] The first polarizer 102 and the second polarizer 113: select a general-purpose high-precision commercial polarizer with a polarization extinction ratio greater than 100:1;
[0034] The first optical lens 106 , the second optical lens 107 , the third optical lens 109 , and the fourth optical lens 110 are high-precision devices commonly used in the market, and the beam expansion and beam reduction ratios are 10 times after assembly.
[0035] Sample 108 to be tested: an irregularly shaped crystal with a size of less than 30×30×30 mm is used. In order to reduce the light deflection caused by the light beam passing through the crystal, the crys...
Embodiment 2
[0040] refer to figure 1, the preferred embodiment 2 of the present invention provides a kind of novel laser polarization phase-shift interference tomography measurement method based on the device described in embodiment 1, which comprises the following steps:
[0041] Step 1: Turn on the laser 101, so that the laser 101 emits a pair of mutually orthogonal linearly polarized lights, that is, a beam of light contains a P-polarized component parallel to the paper surface and an S-polarized component perpendicular to the paper surface;
[0042] Step 2: The light reflected by the polarizing beam splitter 103 and transmitted through the sample to be measured is the measurement light, the light transmitted through the polarizing beam splitter 103 and not passed through the sample to be measured is the reference light, and the measuring light and the reference light are placed between the CCD detector 115 An interference pattern is formed on the image plane;
[0043] Step 3: Rotate ...
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