A Multilevel Ionized Rotating Magnetic Field Accelerated Helicon Wave Plasma Source

Abstract

The invention discloses a multi-stage ionized rotating magnetic field accelerated helicon wave plasma source, which uses helicon wave discharge plasma as the first-order plasma ionization source, uses a multi-level stepped contraction ionization structure, and uses a magnetic confinement structure and a rotating magnetic field to accelerate The structure accelerates the plasma. The present invention uses multi-stage step ionization technology to improve the ionization rate and plasma density of the plasma source propellant, uses magnetic confinement and a rotating magnetic field acceleration structure to accelerate the plasma, and improves the ejection speed of the plasma. In addition, the present invention The overall structural design does not require components such as discharge electrodes and neutralizers that are easily corroded and seriously restrict the life of the plasma source, thereby improving the performance and life of the plasma source.

Description

technical field [0001] The invention belongs to the field of plasma sources, and in particular relates to a plasma that uses helicon discharge plasma as the first-order ionization source, uses a multi-level stepped contraction ionization structure, and uses a magnetic confinement structure and a rotating magnetic field acceleration structure to accelerate the plasma. A multi-stage ionizing rotating magnetic field accelerates a helicon wave plasma source. Background technique [0002] The helicon wave plasma source is a device that can efficiently convert radio frequency wave energy into high-density plasma through an antenna system without electrode contact. It has a variety of propellants (oxygen-enriched gas or air), no electrodes (long life), high ionization rate (nearly 100% in the central area), high density (10 17 -10 20 m -3 ), low magnetic field confinement (<0.1T), high controllability (multi-mode operation), and other significant advantages, it is very suitab...

AI Technical Summary

Problems solved by technology

The use of ion cyclotron resonance acceleration requires a super-strong magnetic field structure, which greatly increases the complexity of the system, and its resonance effect is uncertain and difficult to evaluate

Second-order helicon wave plasma sources that use electrostatic grid acceleration or Hall electromagnetic acceleration require cathodes, neutralizers and other components that are easily corroded and severely restrict the life of the plasma source. Moreover, the processing accuracy of the electrostatic grid is high, and the grid is prone to appear. The problem of short circuit and sputter corrosion, greatly reducing the service life of the plasma source

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