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Device for optically detecting gas

A gas and gas sensor technology, applied in the field of spectral sensing, can solve the problems of inability to carry out real-time and large-scale applications

Pending Publication Date: 2019-12-31
近通物联网(苏州)有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the traditional method requires the use of large spectrometers for the collection and analysis of molecular spectra, which cannot be applied in real time and on a large scale.

Method used

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  • Device for optically detecting gas
  • Device for optically detecting gas
  • Device for optically detecting gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Such as figure 1 As shown, this embodiment provides a gas identification method, the steps are:

[0024] 1) Turn on the two broadband laser beams and the detector so that the device elements are in a stable state.

[0025] 2) Open the gas path control device, and let methane gas flow into the slit 6. The methane gas enters the sensor from the Gas in end and exits from the Gas out end.

[0026] 3) At the same time, adjust the micromirror 3 and adjust the optical path so that the characteristic frequency interferes just at the detector, forming a characteristic spectrum to be detected by the detector.

[0027] 4) Algorithm conversion is performed between the obtained characteristic interference spectrum and the established standard library to identify methane gas molecules and their corresponding concentrations.

Embodiment 2

[0029] Such as figure 1 As shown, this example provides a gas identification method, the steps are:

[0030] 1) Turn on four broadband laser beams and detectors so that the device elements are in a stable state.

[0031] 2) Open the gas path control device, and let in the standard mixed gas of methane and ethylene. The mixed gas enters the sensor from the Gas in end and goes out from the Gas out end.

[0032] 3) At the same time, adjust the micromirror 3 so that various characteristic spectra interfere on the detector in turn, forming multiple groups of characteristic spectra to be recognized by the detector.

[0033] 4) Algorithm conversion is performed between the obtained characteristic interference spectrum and the established standard library to identify methane and ethylene gas molecules and their respective concentrations.

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Abstract

The invention discloses a gas sensor device based on an optical interference principle. The whole device is integrated on the same silicon-based substrate 1, a micro-mirror 3 is arranged in a micro resonant cavity 2, incident light 7 is enabled to form an interference spectrum with gas absorption characteristics at a detection position 8 by adjusting the inclination angle of the micro-mirror, andthe components and the concentration of the detected gas are obtained through characteristic extraction. The method has the advantages of fast response, high sensitivity and strong anti-interference capability.

Description

technical field [0001] The invention belongs to the field of spectrum sensing, in particular to a photon sensor technology. Background technique [0002] In recent years, air quality has been increasingly valued by the government and the public, and efficient, timely and accurate automatic monitoring of pollutants in the ambient air has become a future development trend. At present, the mainstream air composition monitoring mainly relies on electrochemical sensors. Due to the limitation of the principle of electrochemical gas sensors, the actual application life is short, the maintenance cost is high, and it cannot be widely applied; some gas monitoring environments are relatively harsh and there is high humidity. , high temperature, corrosion and other environments greatly limit the application of electrochemical gas sensors; at the same time, electrochemical gas sensors can only identify specific types of gases, and the composition of the air is complex, which is often eas...

Claims

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Application Information

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IPC IPC(8): G01N21/39G01N21/01
CPCG01N21/01G01N21/39G01N2021/0112
Inventor 李扬刘晓海
Owner 近通物联网(苏州)有限公司