Dielectric layer, ion capacitive flexible tactile sensor and preparation method and application thereof

A tactile sensor and dielectric layer technology, applied in the field of sensors, can solve the problems of inability to achieve high sensitivity and pressure resolution, capacitive signal cannot be further increased, and pressure response range is narrow, achieving low detection limit, fast response time, Effects with a wide response range

Active Publication Date: 2020-02-07
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition to the introduction of microstructures, the use of ionic elastomers as dielectric layers allows the interface between the dielectric layer and the electrode to form an electric double layer capacitance to increase the interface capacitance density, which can further improve the sensitivity of the sensor, but cannot achieve a wide pressure range. High sensitivity and pressure resolution
This

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  • Dielectric layer, ion capacitive flexible tactile sensor and preparation method and application thereof
  • Dielectric layer, ion capacitive flexible tactile sensor and preparation method and application thereof
  • Dielectric layer, ion capacitive flexible tactile sensor and preparation method and application thereof

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Embodiment 1

[0075] This embodiment provides a dielectric layer with a structure such as figure 1 As shown, one side of the dielectric layer is provided with at least two protruding structures 1 of different micron sizes, and one side of the dielectric layer is also provided with a groove structure 2 for receiving pressure A convex structure 1 pressed in; wherein the dielectric layer is a composite layer of polyvinyl alcohol / phosphoric acid.

[0076] This embodiment also provides an ion capacitive flexible touch sensor, such as figure 2 As shown, it includes a dielectric layer 101 and electrode layers 100 disposed on both sides of the dielectric layer 101; wherein the electrode layer includes a PI / Au layer and leads connected to the PI / Au layer.

[0077] The preparation method of ion capacitive flexible tactile sensor comprises:

[0078] (1) The preparation method of the electrode layer includes: using a PI film with a thickness of 50 μm as a substrate, and using an electron beam evapor...

Embodiment 2

[0085] This embodiment provides a dielectric layer, one side of the dielectric layer is provided with at least two protruding structures with different micron sizes, and one side of the dielectric layer is also provided with a groove structure, the groove structure is used The raised structure is pressed in under the action of receiving pressure; the dielectric layer is a composite layer of polyvinyl alcohol / phosphoric acid.

[0086] This embodiment also provides an ion capacitive flexible touch sensor, which includes a dielectric layer and electrode layers arranged on both sides of the dielectric layer; wherein the electrode layer includes a PI / Au layer and leads connected to the PI / Au layer.

[0087] The preparation method of ion capacitive flexible tactile sensor comprises:

[0088] (1) The preparation method of the electrode layer includes: using a PI film with a thickness of 40 μm as a substrate, and using an electron beam evaporation method to evaporate a 100 nm thick Au...

Embodiment 3

[0093] This embodiment provides a dielectric layer, one side of the dielectric layer is provided with at least two protruding structures with different micron sizes, and one side of the dielectric layer is also provided with a groove structure, the groove structure is used The raised structure is pressed in under the action of receiving pressure; the dielectric layer is a composite layer of polyvinyl alcohol / phosphoric acid.

[0094] This embodiment also provides an ion capacitive flexible touch sensor, which includes a dielectric layer and electrode layers arranged on both sides of the dielectric layer; wherein the electrode layer includes a PI / Au layer and leads connected to the PI / Au layer.

[0095] The preparation method of ion capacitive flexible tactile sensor comprises:

[0096] (1) The preparation method of the electrode layer includes: using a PI film with a thickness of 100 μm as a substrate, and using an electron beam evaporation method to evaporate a 100 nm thick A...

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Abstract

The invention provides a dielectric layer, an ion capacitive flexible tactile sensor and a preparation method and application thereof. The surface of the dielectric layer is provided with at least twoprojection structures of different micrometer sizes, the surface of the dielectric layer is further provided with a groove structure, and the groove structure is used for bearing the projection structures pressed under the action of pressure; the dielectric layer is provided with a hierarchical self-filling microstructure, so that the dielectric layer shows a relatively wide squeezability and deformability within a super-wide pressure range; the dielectric layer is applied to the capacitive flexible tactile sensor, so that the sensor has higher sensitivity, a wider response range, a lower detection limit, the shorter response time, better stability and extremely high pressure resolution; and the dielectric layer has great application prospects in the fields of robotics, human health monitoring, high-pressure sensing and the like.

Description

technical field [0001] The invention belongs to the field of sensors, and relates to a dielectric layer, an ion capacitive flexible tactile sensor and its preparation method and application, in particular to a dielectric layer based on a hierarchical self-filling microstructure, an ion capacitive flexible tactile sensor and its Preparation methods and applications. Background technique [0002] As the largest organ in the human body, the skin acts as a physical barrier through which we interact with our surroundings, allowing us to perceive various shapes, textures, and varying degrees of contact pressure. Creating flexible tactile sensors similar to human sensory capabilities can enable robots to better realize human-computer interaction (such as taking care of the elderly), enable prosthetics to help disabled people better perceive the outside world, and achieve more timely and accurate human health monitoring and monitoring in medical diagnosis. Diagnosis, so flexible ta...

Claims

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Application Information

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IPC IPC(8): G01L1/14C08J5/18C08L29/04C08K3/32
CPCG01L1/142G01L1/146C08J5/18C08J2329/04C08K2003/329
Inventor 郭传飞白宁宁王柳
Owner SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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