Unlock instant, AI-driven research and patent intelligence for your innovation.

Manufacturing method of topcon solar cell and method and equipment for crystallizing amorphous silicon

A technology of solar cells and amorphous silicon, which is applied in the fields of final product manufacturing, sustainable manufacturing/processing, circuits, etc., and can solve problems such as large temperature difference, thermal stress film explosion, and large film thickness

Active Publication Date: 2021-05-11
IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT LTD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The thickness of the film is relatively large, and the temperature difference from high temperature annealing to room temperature is too large, resulting in excessive thermal stress and the formation of a burst film

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Manufacturing method of topcon solar cell and method and equipment for crystallizing amorphous silicon
  • Manufacturing method of topcon solar cell and method and equipment for crystallizing amorphous silicon
  • Manufacturing method of topcon solar cell and method and equipment for crystallizing amorphous silicon

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0025] specific implementation plan

[0026] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments, so as to better understand the purpose, features and advantages of the present invention. It should be understood that the aspects described below in conjunction with the drawings and specific embodiments are only exemplary, and should not be construed as limiting the protection scope of the present invention. The singular forms "a", "an" and "the" include plural referents unless the context clearly dictates otherwise.

[0027] see figure 1, which shows a schematic diagram of the composition and structure of an embodiment of a TOPCon solar cell applied to the method and equipment for crystallization of amorphous silicon according to the present invention. The TOPCon solar cell 1 includes an N-type silicon wafer 10, which is sequentially formed on the front side of the N-type silicon wafer 10 The P-type di...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention provides a method for manufacturing a TOPCon solar cell and a method and equipment for crystallizing amorphous silicon. The crystallization method includes: (a). Providing a silicon wafer used for TOPCon solar cells and having an oxide layer and an amorphous silicon layer deposited sequentially on the back; (b). Receiving the silicon wafer and heating it at 800-950° C. heat treatment at a temperature of 20 to 40 minutes to crystallize the amorphous silicon layer into a polysilicon layer; and (c). receiving the silicon wafer and performing it at a reduced temperature 50-300° C. lower than the temperature of step (c) 1 to 5 minutes of cooling heat treatment, and after each cooling heat treatment, the silicon wafer is subjected to a heat treatment at a temperature of 800-1000° C. for 10 seconds to 5 minutes to release stress. The invention can effectively avoid the crystallization explosion of the amorphous silicon.

Description

technical field [0001] The invention relates to the field of solar cell manufacturing, in particular to a manufacturing method for TOPCon solar cells and a method and equipment for crystallizing amorphous silicon. Background technique [0002] The concept of TOPCon solar cells was first proposed by Fraunhofer ISE at the 28th EU PVSEC in 2013, which uses an ultra-thin oxide layer and doped thin-film silicon or amorphous silicon to passivate the back of the cell. This structure provides good surface passivation for the back of the silicon wafer. The ultra-thin oxide layer can allow many electrons to tunnel into the polysilicon layer while blocking the recombination of minority electrons and holes, and then the electrons are transported laterally in the polysilicon layer and collected by the metal, thus greatly The metal contact recombination current is reduced, and the open circuit voltage and short circuit current of the battery are increased. [0003] The use of plasma chem...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01L31/18
CPCH01L31/186H01L31/1864H01L31/1876Y02E10/50Y02P70/50
Inventor 马哲国
Owner IDEAL ENERGY (SHANGHAI) SUNFLOWER THIN FILM EQUIPMENT LTD