Lead-free epitaxial thin film with wide working temperature and preparation method thereof
A wide working temperature, epitaxial thin film technology, applied in chemical instruments and methods, metal material coating process, ion implantation plating, etc. Effect of temperature and stable breakdown field strength
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Example Embodiment
[0039] The present invention will be further described in detail below in conjunction with the drawings and embodiments.
[0040] The wide operating temperature lead-free epitaxial film of the present invention is a lead-free epitaxial film with higher operating temperature characteristics, and is a barium titanate-based lead-free epitaxial film. The preparation method includes the following steps:
[0041] Step (1) Weigh the corresponding raw materials according to the chemical formula. Among them, the BST ceramic target (that is, used to grow Ba 0.3 Sr 0.7 TiO 3 Thin-film ceramic target) adopts BaCO with a purity level of 4~5N 3 Powder, SrCO 3 Powder, TiO 2 Powder, BT-BMZ ceramic target (that is, used to grow 0.85BaTiO 3 -0.15Bi(Mg 0.5 Zr 0.5 )O 3 The thin-film ceramic target) is made of BaCO with a purity level of 4~5N 3 Pink, Bi 2 O 3 Powder, TiO 2 Powder, MgO powder and ZrO 2 When sintering the above two ceramic targets, the sintering temperature is lower than the phase forming ...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap