Hydrogen purification equipment carbon adsorption tower in electronic-grade polycrystalline silicon production process

Abstract

The invention discloses a hydrogen purification equipment carbon adsorption tower in electronic-grade polycrystalline silicon production process. The hydrogen purification equipment carbon adsorptiontower comprises a tower body which is of a cylindrical structure, and five groups of oil input pipes, five groups of oil output pipes and 31 heat exchange pipes which are arranged in the tower body; ajacket form is adopted by the outer wall of the tower body, the oil output pipes and the oil input pipes are connected with the heat exchange pipes in the tower body, and the jacket, and the rest space in the tower body is filled with activated carbon. The hydrogen purity is improved, impurities in hydrogen are reduced, the safety of the system is improved, and the continuous operation period ofthe system is prolonged.

Description

technical field [0001] The invention relates to the technical field of polysilicon, in particular to a carbon adsorption tower for hydrogen purification equipment in the production process of electronic-grade polysilicon. Background technique [0002] In the traditional polysilicon production process, the tail gas adopts wet recovery technology, that is, the tail gas in the reduction furnace is initially pressurized to separate chlorosilane, and then rinsed with water to recover hydrogen. Because oxygen, carbon dioxide and other impurity gases will pollute hydrogen during the water rinse process , so a large amount of recovered hydrogen needs to be purified again. During the leaching process, chlorosilane is hydrolyzed to produce sewage, which needs further treatment, resulting in environmental pollution and high material consumption. At the same time, the hydrogen generated in production has not been fully utilized. A waste of energy has led to environmental pollution. [...

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Problems solved by technology

[0005] (1) Wet technology recovers exhaust gas, the process is complicated, the recovery rate is not high, and various materials are not fully recycled;

[0006] (2) Since the hydrogen gas obtained by using water and alkali as absorbent is saturated by a large amount of water, various trace impurity gases in the water also enter the hydrogen gas to cause difficulties in repurifying the hydrogen gas, which will affect the normal production of polysilicon in severe cases;

[0007] (3) The generated hydrogen is not fully utilized, and the discharged hydrogen contains other impurities, causing environmental pollution

[0008] (4) Both temperature swing adsorption and pressure swing adsorption have the problems of unsatisfactory adsorption effect, low purity or low recovery rate

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