The utility model relates to patch resistance substrate production technical field, concretely is a kind of patch resistance substrate
cutting dust removal device, including modular quick-release
filter element assembly, modular quick-release
filter element assembly includes: filter box body;Drawer type
filter element module, and the sliding connection is achieved with installation cavity by slide rail structure;Panel locking
assembly, preliminary fixing drawer type filter element module is adsorbed
magnetism metal block by
electromagnet;Pneumatic locking assembly,
control unit controls high-pressure gas source to pneumatic seal ring inflation to make it swell and realize sealing and lock;Drawer type filter element module is slidably installed in installation cavity by slide rail assembly, after preliminary positioning is realized by cooperation
electromagnet, positioning hole, positioning piece,
control unit controls pneumatic seal ring inflation to swell and completely adhere installation
cavity wall, complete final locking, pneumatic seal ring cooperation first sealing
gasket, second sealing
gasket realizes double locking, and the sealing property is superior to traditional mechanical structure, avoid dust leakage, improve the efficiency of filter element replacement on the other hand.