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A preparation method and application of ultra-high-purity cobalt plate with controllable structure

A pure cobalt plate, ultra-high technology, applied in the field of preparation of ultra-high-purity cobalt plate, can solve the problems of uneven grain size distribution, low β-Co phase content, substandard magnetic permeability, etc., and achieve billet substructure. The effect of uniform defect distribution, refinement and homogenization of billet structure and uniform internal structure

Active Publication Date: 2021-04-13
CENT SOUTH UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] In view of the problems in the prior art that the cobalt target used for magnetron sputtering has low purity, uneven grain size distribution, low β-Co phase content of the face centered cubic fcc structure, and substandard magnetic permeability, the purpose of the present invention is to provide A preparation method and application of an ultra-high-purity cobalt plate with controllable structure. A high-purity billet is prepared by a smelting method, and the billet is opened by multiple three-dimensional high-speed isothermal hot forging, and a variable-angle cross-rolling process is adopted. Obtain ultra-high-purity cobalt targets with excellent comprehensive performance

Method used

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  • A preparation method and application of ultra-high-purity cobalt plate with controllable structure
  • A preparation method and application of ultra-high-purity cobalt plate with controllable structure
  • A preparation method and application of ultra-high-purity cobalt plate with controllable structure

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Embodiment 1

[0040]This embodiment provides a method for preparing a tissue-controllable ultra-high-purity cobalt target, including the following steps:

[0041] The cobalt powder (purity is 99.997%) is subjected to vacuum vertical melting after cold isostatic pressing under 200MPa pressure. The vertical melting temperature is 1320°C and the vacuum degree is 10 -4 Pa; put the vertical molten cobalt ingot in a high vacuum of 10 -4 Melting in a Pa electron beam melting furnace, the melting temperature is 1580°C, after cooling, the ingot is again placed in a high vacuum -4 Melting in a Pa electron beam melting furnace at a melting temperature of 1580°C (each melting time is 0.5 hours); the obtained high-density ingot is covered with stainless steel in an argon chamber; the wrapped ingot is heated to 950°C and kept warm For 1.5 hours, make the axial direction of the billet parallel to the direction of the forging force, and carry out two forging deformations, in which the deformation of the f...

Embodiment 2

[0058] This embodiment provides a method for preparing a tissue-controllable ultra-high-purity cobalt target, including the following steps:

[0059] The cobalt powder (purity is 99.997%) is subjected to vacuum vertical melting after cold isostatic pressing under 200MPa pressure. The vertical melting temperature is 1320°C and the vacuum degree is 10 -4 Pa; put the vertical molten cobalt ingot in a high vacuum of 10 -4 Melting in a Pa electron beam melting furnace, the melting temperature is 1580°C, after cooling, the ingot is again placed in a high vacuum -4 Melting in a Pa electron beam melting furnace at a melting temperature of 1580°C (each melting time is 0.5 hours); the obtained high-density ingot is covered with stainless steel in an argon chamber; the wrapped ingot is heated to 950°C and kept warm For 1.5 hours, make the axial direction of the billet parallel to the direction of the forging force, and carry out two forging deformations, in which the deformation of the ...

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Abstract

The invention discloses a preparation method and application of ultra-high-purity cobalt plate with controllable structure. The preparation method includes: cold press forming, high vacuum vertical melting, high vacuum electron beam melting furnace, and stainless steel sheath in argon chamber Three-dimensional high-speed isothermal hot forging with coordinated control of pass, forging deformation and total deformation, variable angle cross-controlled rolling and heat treatment, turning processing, packaging and other steps, the purity of the prepared ultra-high-purity cobalt is ≥99.995%, the average The grain size is 10-40 μm, the content of β-Co with fcc structure in the plate exceeds 50%, the magnetic permeability is greater than 70%, and the non-uniformity of magnetic permeability is less than 1%. The preparation method designed in the present invention can effectively control the grain size and grain size distribution of the finished product, and regulate the tissue distribution of the finished product, which provides raw material guarantee for its use as a high-quality target.

Description

technical field [0001] The invention belongs to the technical field of design and preparation of special materials, and in particular relates to a preparation method and application of an ultra-high-purity cobalt plate with controllable tissue. Background technique [0002] Metal cobalt is a typical ferromagnetic metal. When it is not magnetized, its interior is divided into many spontaneously magnetized magnetic domains (magnetization tends to be saturated). Since the magnetic moment directions and sizes of magnetic domains are different from each other, Therefore, the net magnetic moment and the magnetization vector of the ferromagnetic material are both zero. When a certain external magnetic field is applied, the orientation of the originally randomly arranged magnetic domains will tend to be consistent, and the ferromagnet will show stronger magnetism at this time. As magnetic materials, cobalt and cobalt-based alloys are widely used in the preparation of optoelectronic...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C22B9/22C22B9/04C22F1/10B22F3/04
CPCB22F3/04C22B9/04C22B9/228C22F1/10C23C14/3414C23C14/35
Inventor 肖柱方梅李周朱云天陈志永
Owner CENT SOUTH UNIV
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