High temperature resistant adjustable frequency flexible antenna and manufacturing method thereof

A technology for flexible antennas and manufacturing methods, applied to antennas, devices that allow antennas to work in different bands at the same time, electrical components, etc., can solve problems such as single working environment, inability to adapt to multi-scenario applications, single operating frequency of flexible antennas, etc. , to achieve the effect of high elasticity, good flexibility and excellent insulation performance

Active Publication Date: 2022-06-03
INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In addition, most traditional flexible antennas only have a single working frequency and a single working environment, which cannot adapt to the current trend of multi-scenario applications

Method used

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  • High temperature resistant adjustable frequency flexible antenna and manufacturing method thereof
  • High temperature resistant adjustable frequency flexible antenna and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0068] A flexible mica sheet 10 with a thickness of 10 μm was placed in a vacuum chamber and evacuated to 3×10 -3 Pa. Fill the vacuum chamber with Ar to make the vacuum degree 0.1Pa, turn on the heater power, heat the flexible mica sheet 10 to 50°C, turn on the Plasma power supply, adjust the voltage to 1000V, and the flexible mica sheet 10 is heated by the generated Ar plasma. Process 2min. Power off Plasma and evacuate to 3×10 -3 Pa, heat the flexible mica sheet 10 to 300°C, and fill the vacuum chamber with Ar and O at the same time 2 , the ratio of their flow values ​​is 2:1, so that the vacuum degree is 0.1Pa, turn on the magnetron sputtering power supply, adjust the power to 80W, and form a dielectric adjustable barium titanate material for the flexible mica sheet 10 magnetron sputtering deposition. For the ceramic thin film 20, the deposition time is 10 minutes, and the thickness of the dielectric tunable ceramic thin film 20 is 200 nm. Incubate in oxygen for 20 min,...

Embodiment 2

[0070] A flexible mica sheet 10 with a thickness of 50 μm was placed in a vacuum chamber and evacuated to 3×10 -3 Pa. Fill the vacuum chamber with O 2 , the vacuum degree is 0.5Pa, the heater power is turned on, the flexible mica sheet 10 is heated to 150°C, the Plasma power is turned on, the voltage is adjusted to 2000V, and the flexible mica sheet 10 is treated by the generated oxygen plasma for 20min. Power off Plasma and evacuate to 3×10 -3 Pa, heating the flexible mica sheet 10 to 700°C, and filling the vacuum chamber with Ar and O at the same time 2 , the ratio of their flow values ​​is 5:1, so that the vacuum degree is 0.5Pa, turn on the magnetron sputtering power supply, adjust the power to 150W, and deposit 10 magnetron sputtering on the flexible mica sheet. The ceramic thin film 20 is adjusted, the deposition time is 2h, and the thickness is 2.4 μm. Incubate in oxygen for 60 min, and cool to room temperature. The screen printing screen with a mesh size of 300 me...

Embodiment 3

[0072] The flexible mica sheet 10 with a thickness of 10 μm is sandblasted to make the surface roughness 100 nm, and placed in a vacuum chamber, evacuated to 3×10 -3 Pa. Fill the vacuum chamber with Ar to make the vacuum degree 0.1Pa, turn on the heater power, heat the flexible mica sheet 10 to 50°C, turn on the Plasma power supply, adjust the voltage to 1000V, and the flexible mica sheet 10 is heated by the generated Ar plasma. Process 2min. Turn off the Plasma power and evacuate to 3×10 -3 Pa, heat the flexible mica sheet 10 to 300°C, and fill the vacuum chamber with Ar and O at the same time 2 , the ratio of their flow values ​​is 2:1, so that the vacuum degree is 0.1Pa, turn on the magnetron sputtering power supply, adjust the power to 80W, and deposit the barium titanate material on the mica sheet by magnetron sputtering to form a dielectric tunable ceramic film 20, the deposition time is 10 min, and the thickness is 200 nm. Incubate in oxygen for 20 min, then cool to...

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Abstract

A high-temperature-resistant adjustable-frequency flexible antenna and a manufacturing method thereof. The high-temperature-resistant adjustable-frequency flexible antenna uses a flexible mica sheet as a flexible base layer, and a dielectrically adjustable ceramic film is arranged between the metal layer and the flexible mica sheet. Adjusting electrodes are arranged on the side of the flexible mica sheet away from the dielectrically adjustable ceramic film, so that the high temperature-resistant adjustable frequency flexible antenna can also adjust the operating frequency of the antenna while being able to withstand higher temperatures.

Description

technical field [0001] The invention relates to the field of flexible antenna manufacturing, in particular to a high-temperature-resistant and frequency-adjustable flexible antenna and a manufacturing method thereof. Background technique [0002] Traditional flexible antennas use polymer materials such as PI film, PET film, LCP film, etc. as the substrate, which are metallized on the surface and then patterned to form a flexible antenna. However, since polymer materials cannot withstand high temperatures, such as temperatures >500°C, traditional flexible antennas cannot be used at high temperatures. [0003] Among inorganic dielectric materials, high-temperature resistant materials mainly include glass, ceramics, etc., but ceramic materials cannot be directly used as flexible substrates because they cannot be flexible. Poor water quality makes it difficult to form a metallized layer with a high-strength bond on the surface. [0004] If the antenna is composed of a metal...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01Q1/38H01Q5/10H01Q5/20H01Q5/30H01Q5/307
CPCH01Q1/38H01Q5/10H01Q5/20H01Q5/30H01Q5/307
Inventor 冯雪王志建陈颖
Owner INST OF FLEXIBLE ELECTRONICS TECH OF THU ZHEJIANG
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