An air-clad su8 arrayed waveguide grating
An arrayed waveguide grating and arrayed waveguide technology, which is applied in the directions of optical waveguides, light guides, optics, etc., can solve the problems of complex fabrication process and low integration of arrayed waveguide gratings, and achieve the elimination of inhomogeneity, good thermal stability and good thermal stability. Effects of film-forming properties
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Embodiment 1
[0021] Embodiment 1 provides an air cladding SU8 arrayed waveguide grating, such as figure 1 As shown, it includes an input channel waveguide 11 , an input slab waveguide 12 , an array waveguide 13 , an output slab waveguide 14 , and an output channel waveguide 15 connected in sequence. The arrayed waveguide grating adopts SU8 glue 22 on a silicon dioxide substrate 23 (same as figure 1 Made on the silicon dioxide substrate 16) in the above, the arrayed waveguide grating adopts an air cladding 21, such as figure 2 shown. The SU8 adhesive 22 has good film-forming properties, heating can eliminate the unevenness of the film thickness, realize the self-levelling of the film, have no obvious miscibility with the base material, have low light loss, and good thermal stability.
[0022] The input channel waveguide 11 includes a first straight waveguide section and a first curved waveguide section, and the two sections are smoothly connected. The output channel waveguide 15 include...
Embodiment 2
[0030] Embodiment 2 provides a specific air-clad SU8 arrayed waveguide grating, see figure 1 , the waveguide width and height of the arrayed waveguide grating are both 10 μm, the center wavelength of the input channel waveguide 11 is 1550 nm, and the wavelength interval is 0.8 nm, the channel number of the input channel waveguide 11 is 1, and the channel number of the output channel waveguide 15 is The number of channels is 8, the center distance of the arrayed waveguide 13 is 20 μm, the number of orders is 80, the diameter of the Rowland circle is 9362.89 μm, the length difference between adjacent waveguides of the arrayed waveguide 13 is 82.67 μm, and the arrayed waveguide 13 The waveguide number is 51.
[0031] see Figure 1-Figure 3 , the complex signal light with a wavelength of 1550nm as the center is firstly reflected by the first reflection plane 31 in the vertical coupling region, and then the light enters the central input channel waveguide 11 through the first inci...
Embodiment 3
[0033] When the air-clad SU8 arrayed waveguide grating 44 provided in embodiment 1 or embodiment 2 is applied to the photoelectric circuit board 43, the arrayed waveguide grating 44 and the photoelectric circuit board 43 are detachably installed, and the vertical cavity surface laser (vcsel) 41 emits a beam of light waves, passes through the first lens 42, and then focuses and enters the first reflection plane of the vertical coupling structure of the input channel waveguide, the reflected light reaches the first incident plane for transmission, and finally passes through the output channel waveguide The second reflective plane and the second lens reach the diode 45 to realize the transmission function in the photoelectric circuit board, such as Figure 4 shown.
[0034] The arrayed waveguide grating provided by the invention is installed on the photoelectric circuit board, which can effectively reduce the size of components; the arrayed waveguide grating is applied to the fli...
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