Micro-lens manufacturing method based on CO2 laser melting assisted by high-pressure gas

Abstract

The invention relates to the technical field of optical material processing equipment, and especially relates to a micro-lens manufacturing method based on CO2 laser melting assisted by a high-pressure gas. The method comprises the following steps of 1, manufacturing a preform, and manufacturing the preform by using a machining method; 2, carrying out CO2 laser reshaping, emitting a CO2 laser to asurface of the preform by using a CO2 laser to generate a high-temperature region at a temperature higher than a melting temperature or softening temperature of a material, and then injecting a high-pressure gas to a softening region by using a nozzle to reshape the preform; and 3, carrying out multi-area remodeling, making a CO2 laser focus and the nozzle keep moving consistently, generating linear motion, spiral motion, rotation motion, sawtooth vibration motion and other relative motion between the CO2 laser focus and the nozzle and an optical material, making the optical material, the CO2laser focus and the nozzle generate relative three-dimensional motion, and carrying out high-temperature melting and shaping on the optical materials in different areas. According to the method, a rapid forming property of laser melting is utilized, high-pressure gas forming is assisted, and efficient machining of an optical material micro lens is achieved.

Description

technical field [0001] The invention relates to the technical field of optical material processing equipment, in particular to a high-pressure gas-assisted CO 2 Microlens Fabrication Method by Laser Melting. Background technique [0002] Optical materials mainly include optical glass materials, quartz materials, optical crystal materials, etc. The optical material microlens structure has the characteristics of small unit size and high degree of integration, which can realize planar / three-dimensional imaging, light interference / diffraction, has functions that cannot be realized by traditional lenses, and can constitute many new optical systems. Microlenses have broad application scenarios in fields such as AR / VR, communication interconnection, and precision guidance. At present, the processing methods of optical material microlens mainly include photolithography, high-energy beam processing, forming replication and ultra-precision machining. [0003] Photolithography is a ...

AI Technical Summary

Problems solved by technology

However, due to the limitation of the size and wear of the grinding wheel, ultra-precision machining is difficult to process micro-lenses of extremely small size

In addition, the ultra-precision cutting process takes a long time, and the tool wear is serious, resulting in increased machining errors, reducing the overall uniformity of the microlens, and bringing extremely high tool cost

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