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Ion source system with automatic diaphragm and ion beam processing system

A processing system and ion beam technology, applied in the field of ion source system and ion beam processing system, can solve the problems such as manual replacement of diaphragm for ion source, increase processing time, reduce processing efficiency, etc., so as to save time for repeated positioning, The effect of saving processing time and improving processing efficiency

Inactive Publication Date: 2020-04-28
长沙埃福思科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This greatly increases processing time, reduces processing efficiency, and even introduces pollution
[0004] The invention provides an ion source system with an automatic diaphragm and an ion beam modification processing system, which are used to solve the need for manual replacement of the ion source diaphragm and repeated "vacuum breaking-vacuumizing" in the existing ion beam modification processing equipment The problem

Method used

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  • Ion source system with automatic diaphragm and ion beam processing system
  • Ion source system with automatic diaphragm and ion beam processing system
  • Ion source system with automatic diaphragm and ion beam processing system

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Embodiment 1

[0030] see figure 1 , the ion beam modification processing system with automatic aperture of the present embodiment includes a main vacuum chamber 8 and a secondary vacuum chamber 1 that can be communicated or closed through a gate valve 4; the secondary vacuum chamber 1 is provided with the processing of the workpiece 2 The work station and the workpiece movement system 5 that drives the movement of the workpiece 2; the main vacuum chamber 8 is provided with an ion source 7 with an automatic aperture and an ion source movement system 6 for driving the ion source 7; the main vacuum chamber 8 is automatically moved along the belt. The ion beam irradiation direction of the ion source 7 of the aperture is arranged and the processing station is within the irradiation range of the ion source 7;

[0031] see figure 1 , figure 2 , the ion source system with an automatic diaphragm in this embodiment includes an ion source motion system 6 and an ion source 7 with an automatic diaphr...

Embodiment 2

[0039]The structure of the ion beam shaping processing system with an automatic diaphragm in this embodiment is basically the same as that in Embodiment 1, and will not be repeated here. The only difference between the two is: see Figure 4 , in this embodiment, the automatic diaphragm 72 includes: a driving control unit 721 and a transmission pinion 722 connected thereto; the transmission gear A727 and the transmission pinion 722 are meshed with each other; Its one end is connected with the fixed ring 729 , and the other end is connected with the rotating housing 7210 .

[0040] When working in this embodiment, see Figure 4 , the constraint on the beam shape of the ion beam is realized by the following method:

[0041] The drive control unit 721 drives the transmission gear A727 meshed with it to rotate through the transmission pinion 722; as the transmission gear A727 rotates clockwise or counterclockwise, the rotating housing 7210 connected with the transmission gear A72...

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Abstract

The invention discloses an ion source system with an automatic diaphragm and an ion beam processing system. The processing system comprises an ion source system with an automatic diaphragm, and is characterized in that the size of an ion beam can be changed and whether there is the ion beam can be controlled by automatically adjusting the size of the diaphragm and completely closing the diaphragm,so that after one-time ion beam processing is finished, a vacuum cavity does not need to be opened, the diaphragm does not need to be manually replaced, the cost is reduced, and the stability is improved.

Description

technical field [0001] The invention relates to the technical field of ion beam modification processing in a vacuum environment, in particular to an ion source system with a diaphragm and an ion beam processing system. Background technique [0002] Ion beam modification processing is a technology for deterministic processing of components, which has the characteristics of high precision, high stability and non-contact processing. The basic principle is to achieve material removal through the physical sputtering effect when low-energy ions bombard the surface of the component under vacuum conditions. When the low-energy ion beam sweeps the surface of the component with a suitable dwell time and moving path, accurate correction of local surface shape errors can be realized. [0003] In order to obtain ion beams of different shapes and sizes, an ion aperture is usually used downstream of the ion beam to control the shape and size of the ion beam. For the ion beam processing e...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01J37/09H01J37/20H01J37/08
CPCH01J37/09H01J37/20H01J37/08
Inventor 不公告发明人
Owner 长沙埃福思科技有限公司