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Closed-loop control system for three-dimensional micro-area electrochemical deposition

A closed-loop control, electrochemical technology, applied in the electrolysis process, electrolysis components, cells, etc., can solve the problems of printing pattern interruption, microtubule blockage, deposition rate variation, etc.

Active Publication Date: 2020-05-01
橙河微系统科技(上海)有限公司
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The main purpose of the present invention is to provide a closed-loop control system for three-dimensional micro-area electrochemical deposition, so as to solve the problem that the deposition rate changes due to current fluctuations in the electrochemical deposition process, resulting in printing pattern interruption and micropipe blockage. question

Method used

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  • Closed-loop control system for three-dimensional micro-area electrochemical deposition
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  • Closed-loop control system for three-dimensional micro-area electrochemical deposition

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experiment example

[0107] In this embodiment, taking the electrochemical deposition of copper micro-wires in the Z direction as an example, the operation of the closed-loop control system for the three-dimensional micro-area electrochemical deposition is introduced.

[0108] The electrolyte used was 0.05M copper sulfate aqueous solution. The microtube 11 used is a glass capillary with an outer diameter of 1.5 mm and an inner diameter of 0.85 mm. The capillary is sharpened through a melting stretching process, and the diameter of the tip after processing is about 3 microns. The capillary was perfused with an aqueous solution of copper sulfate. The processed product 9 is a glass slide coated with a gold layer. During the deposition process, the gold layer is grounded, and a bias voltage is applied to the copper wire inserted into the electrolytic solution. as per figure 1 Connect the parts as shown.

[0109] When the tip of the capillary is close to the surface of the processed product, the fee...

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Abstract

The invention provides a closed-loop control system for three-dimensional micro-area electrochemical deposition. The closed-loop control system comprises a micro-tube device, a workbench and a main controller, wherein the micro-tube device and the workbench are in electric control connection with the main controller, and the micro-tube device, the surface of a machined product and the main controller form a first loop; a first closed-loop control scheme and a second closed-loop control scheme are stored in the main controller; and when the first closed-loop control scheme is executed, the maincontroller controls the micro-tube device to approach the surface of the machined product borne by the workbench until the main controller detects that the first loop feeds back a preset approachingcurrent value Ia, and the second closed-loop control scheme is executed, so that the main controller controls the micro-tube device to be matched with the workbench, and electrochemical deposition machining is started on the surface of the machined product, and therefore the printing process is guaranteed to be stably carried out, and the problems that in the prior art, printing patterns are possibly interrupted, or micro-tubes are blocked are solved.

Description

technical field [0001] The invention relates to electrochemical deposition control technology, in particular to a closed-loop control system for three-dimensional micro-area electrochemical deposition. Background technique [0002] Electrochemical deposition refers to the technology of forming a coating through the migration of positive and negative ions in the electrolyte solution under the action of an external electric field and the redox reaction of gaining and losing electrons on the electrode. With extensive attention from the world and academia, it can realize the precise printing of various metal micro-nano three-dimensional structures. In these micro-nano 3D printing processes, the precise control of the distance between the hollow microtubes and the deposition surface during the approach process and the real-time regulation of the moving speed of the hollow microtubes during the micro-nano structure printing process determine the size, accuracy and printing quality...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C25D21/12C25D17/00B33Y10/00B33Y30/00B33Y50/02
CPCB33Y10/00B33Y30/00B33Y50/02C25D17/00C25D21/12
Inventor 龚大卫张杰
Owner 橙河微系统科技(上海)有限公司
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