A method for preparing a metal bipolar plate multi-nano-coating structure for a proton exchange membrane fuel cell
A technology of metal bipolar plates and proton exchange membranes, which is applied to fuel cell components, fuel cells, metal material coating technology, etc., and can solve the problems of poor durability, electrical conductivity, and corrosion resistance of coatings, etc. problems, achieve strong corrosion resistance, meet commercial needs, and accelerate the effect of reaction rate
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
preparation example Construction
[0036] The preparation method of the multi-nanometer coating structure of the metal bipolar plate, such as figure 2 shown, including the following steps:
[0037] (1) cleaning the metal bipolar plate;
[0038] (2) Utilize any process in PVD (Physical Vapor Deposition) / CVD (Chemical Vapor Deposition) / ALD (Atomic Layer Deposition) / Electrodeposition on the metal plate after the cleaning treatment, first prepare the seed layer;
[0039] (3) Reusing any one of PVD (Physical Vapor Deposition) / CVD (Chemical Vapor Deposition) / ALD (Atomic Layer Deposition) / electrodeposition processes to prepare the first functional layer;
[0040] (4) Utilize ALD (atomic layer deposition) process to prepare the second functional layer on the first functional layer;
[0041](5) Finally, a catalytic layer is deposited on the second functional layer by using an ALD (atomic layer deposition) process.
Embodiment 1
[0043] A method for preparing a metal bipolar plate multi-nano-coating structure of a proton exchange membrane fuel cell, comprising the steps of:
[0044] (1) prepare a 7nm Pt seed layer by magnetron sputtering (a kind of PVD) on the stainless steel pole plate after cleaning;
[0045] (2) adopt the PEALD method to prepare the first functional layer, such as image 3 As shown, the metal plate with the prepared seed layer is subjected to the following cycle sequence PDMAT(0.5s)-N under the conditions of 300°C and pressure 300pa 2 Purge (5s)-NH 3 (3s)-N 2 Purge (5s), N as carrier and purge gas 2 The flow rate is 400sccm, NH 3 The flow rate was 100 sccm, and the number of cycles was 600 to obtain the first functional layer of a TaN thin film with a thickness of 30 nm.
[0046] Among them, the radio frequency of the plasma generator is 13.56MHz, and the power is 400W; MeCpPtMe 3 The source bottle was heated to 80°C to obtain sufficient saturation vapor pressure.
[0047] (3...
Embodiment 2
[0054] A method for preparing a metal bipolar plate multi-nano-coating structure of a proton exchange membrane fuel cell, comprising the steps of:
[0055] (1) Prepare a 100nm thick TiC first functional layer by CVD on the cleaned titanium alloy;
[0056] (2) The second functional layer is prepared by the PEALD method, such as image 3 As shown, the metal plate with the first functional layer is prepared, under the conditions of 400 ° C and a pressure of 250 Pa, according to the following cycle sequence TiCl 4 (1s)-He purge (10s)-NH 3 (1s)-He purge (10s), N as carrier gas and purge gas 2 The flow rate is 350sccm, NH 3 The flow rate is 300 sccm, the number of cycles is 10000, and the second functional layer of TiN thin film with a thickness of 500 nm is obtained.
[0057] Among them, the radio frequency of the plasma generator is 13.56MHz, and the power is 400W.
[0058] (3) adopt ALD method to prepare catalytic layer, as image 3 As shown, the metal plate with the second...
PUM
| Property | Measurement | Unit |
|---|---|---|
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
| thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
Login to View More