A Silicon Microresonant Frequency Doubler Based on Superharmonic Synchronization Technology

A technology of silicon micro-resonance and frequency multiplier, which is applied in power oscillators, electrical components, etc., can solve the problems of reducing the quality of frequency multiplied signals, and achieve high frequency stability, small size, and stable frequency

Active Publication Date: 2022-02-11
XI AN JIAOTONG UNIV
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Problems solved by technology

After the existing commercial frequency multiplier performs frequency multiplication processing on the signal, the phase noise of the output multiplied signal increases at least n2 times with the increase of the frequency multiplication number n, which greatly reduces the quality of the frequency multiplied signal

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  • A Silicon Microresonant Frequency Doubler Based on Superharmonic Synchronization Technology
  • A Silicon Microresonant Frequency Doubler Based on Superharmonic Synchronization Technology
  • A Silicon Microresonant Frequency Doubler Based on Superharmonic Synchronization Technology

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Embodiment Construction

[0031] In the description of the present invention, it should be understood that the terms "first" and "second" are used for description purposes only, and cannot be interpreted as indicating or implying relative importance or implicitly indicating the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0032] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanically connected or electrically connected; it can be directly connected or indirectly connected through an intermediary, and it can be the i...

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Abstract

The invention discloses a silicon micro-resonant frequency multiplier based on superharmonic synchronization technology. The resonant module is a long-distance resonant beam, which is fixedly supported at both ends by two fixed support modules. The lower end of the resonant beam is suspended in the Single crystal silicon substrate; an excitation module is installed in the middle of one side of the resonant beam, and a detection module is correspondingly installed in the middle of the other side. Both the excitation module and the detection module are fixed on the single crystal silicon substrate. The module is connected to the oscillation module, and the two ends of the resonant beam are respectively connected to the piezoresistive frequency modulation module to generate a potential difference on the resonant beam body, and the oscillation frequency of the oscillator is adjusted through the Joule heating effect to achieve superharmonic synchronization of different orders. The invention can realize ultra-high-order frequency multiplication amplification, breaking through the limit of frequency multiplication times of existing frequency multipliers.

Description

technical field [0001] The invention belongs to the technical field of micromechanical systems and frequency processing, in particular to a silicon micro-resonance frequency multiplier based on super-harmonic synchronization technology. Background technique [0002] With the continuous development of computer systems, communication systems, navigation, aerospace, digital TV, and satellite positioning, the requirements for low spurious, low noise, spectral purity, frequency range, and frequency stability of frequency sources are getting higher and higher. Frequency multipliers are mostly used in microwave and millimeter wave transmitter and receiver circuits to generate high frequency signal sources that cannot be obtained on fundamental frequency oscillators. For example, in a handheld mobile phone, a frequency multiplier can be used as an important component to increase the frequency of the carrier signal. After the signal is processed by frequency doubling, the frequency ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03B5/18
CPCH03B5/18
Inventor 韦学勇徐柳
Owner XI AN JIAOTONG UNIV
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