A connection structure, connection method and application of a quartz tuning fork and a base

A technology of quartz tuning fork and connection structure, which is applied in the direction of gyro effect for speed measurement, gyroscope/steering induction equipment, instruments, etc., can solve problems such as thermal stress, gas release, thermal expansion coefficient mismatch, etc.

Active Publication Date: 2021-09-10
BEIJING CHENJING ELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the problem that the quartz and the base material in the prior art are connected by epoxy resin insulating adhesive glue, and the heat generated due to the mismatch between the thermal expansion coefficient of the epoxy resin and the quartz and the base material Stress, at the same time will release the defect of gas over time, so as to provide a connection structure and connection method of the quartz tuning fork and the base

Method used

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  • A connection structure, connection method and application of a quartz tuning fork and a base
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  • A connection structure, connection method and application of a quartz tuning fork and a base

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Embodiment 1

[0056] This embodiment provides a method for connecting a quartz tuning fork to a base, such as Figure 1-Figure 6 As shown, it specifically includes the following steps:

[0057] (1) On the central island 11 of the quartz tuning fork 1, magnetron sputtering is used to sequentially deposit a 20nm Cr layer 31 and a 6000nm first Au layer 32;

[0058] (2) The structure obtained in step (1) is precisely defined by using a photolithography process, so that the area corresponding to the target structure is covered by photoresist;

[0059] (3) A wet etching process is adopted for the Cr layer 31 and the first Au layer 32, and after the etching is completed, the photoresist is removed to form a target pattern;

[0060] (4) Precisely define the structure obtained in step (3) by photolithography, so that the region corresponding to the target structure is not covered by photoresist;

[0061] (5) adopt thermal evaporation to deposit the second Au layer 34 of the Sn layer 33 of 4000nm a...

Embodiment 2

[0073] This embodiment provides a method for connecting a quartz tuning fork to a base, such as Figure 1-Figure 6 As shown, it specifically includes the following steps:

[0074] (1) On the central island 11 of the quartz tuning fork 1, magnetron sputtering is used to sequentially deposit a 19nm Cr layer 31 and a 6300nm first Au layer 32;

[0075] (2) The structure obtained in step (1) is precisely defined by using a photolithography process, so that the area corresponding to the target structure is covered by photoresist;

[0076] (3) A wet etching process is adopted for the Cr layer 31 and the first Au layer 32, and after the etching is completed, the photoresist is removed to form a target pattern;

[0077] (4) Precisely define the structure obtained in step (3) by photolithography, so that the region corresponding to the target structure is not covered by photoresist;

[0078] (5) adopt thermal evaporation to deposit the second Au layer 34 of the Sn layer 33 of 4200nm a...

Embodiment 3

[0090] This embodiment provides a method for connecting a quartz tuning fork to a base, such as Figure 1-Figure 6 As shown, it specifically includes the following steps:

[0091] (1) On the central island 11 of the quartz tuning fork 1, magnetron sputtering is used to sequentially deposit a Cr layer 31 of 21 nm and a first Au layer 32 of 5700 nm;

[0092] (2) The structure obtained in step (1) is precisely defined by using a photolithography process, so that the area corresponding to the target structure is covered by photoresist;

[0093] (3) A wet etching process is adopted for the Cr layer 31 and the first Au layer 32, and after the etching is completed, the photoresist is removed to form a target pattern;

[0094] (4) Precisely define the structure obtained in step (3) by photolithography, so that the region corresponding to the target structure is not covered by photoresist;

[0095] (5) adopt the second Au layer 34 of the Sn layer 33 of thermal evaporation deposition ...

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Abstract

The invention discloses a connection structure between a quartz tuning fork and a base, which includes an isolated island, a boss and a multi-layer metal film layer arranged between the two for connecting the two with each other, the isolated island is arranged at the center of the quartz tuning fork, and the The boss is arranged on the surface of the base. The present invention also provides a connection method of the above-mentioned quartz tuning fork and base connection structure and an application in the quartz tuning fork gyroscope. The invention uses a micro-assembly process to connect the quartz tuning fork and the base. Based on the properties of the material, it fundamentally solves the inevitable temperature mismatch and gas release between the quartz tuning fork and the base based on the epoxy resin bonding process, and can effectively improve The full-temperature performance and temperature stability of the quartz gyroscope ensure the strength and reliability of the connection structure. At the same time, the use of MEMS technology can be compatible with traditional automatic bonding equipment, and the micron-level micro-assembly accuracy is guaranteed through specific micro-assembly process parameters.

Description

technical field [0001] The invention relates to the field of quartz tuning fork gyroscope processing, in particular to a connection structure, a connection method and an application of a quartz tuning fork and a base. Background technique [0002] Micromechanical gyroscope is the core component of modern inertial navigation and control technology, widely used in aerospace, weaponry, industrial control and consumer electronics. Among them, the quartz tuning fork gyroscope has high detection accuracy and has been widely used in high-precision application fields. The processing of quartz tuning fork gyro can be divided into three stages. The first stage is the processing of quartz tuning fork, that is, the precision machining of the quartz tuning fork structure through MEMS technology; The micro-assembly of the quartz tuning fork and the base is realized by insulating adhesive glue, etc.; the third stage is the packaging of the quartz tuning fork and gyroscope core, that is, t...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5621G01C19/5628
CPCG01C19/5621G01C19/5628
Inventor 朱京张琳琳林立男
Owner BEIJING CHENJING ELECTRONICS
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