Meter-level large-aperture optical components co 2 Laser polishing device and polishing method

Abstract

The invention relates to a meter-level large-aperture optical element CO 2 Laser polishing device. On the basis of moving the optical components at a uniform speed on the workbench, the laser beam passes through the hole on the bracket, and the beam is transmitted to the vibrating mirror system composed of the vibrating mirror and the focusing mirror through the reflector to realize the processing of the optical components. There is an integrated reflector, galvanometer, and focusing mirror to move linearly in the direction of laser incident from the hole, and the optical transmission will not be affected by the movement of the galvanometer system, so that the combination of worktable movement and galvanometer system movement is well realized. Coarse positioning of the motion track, the movement of the galvanometer system itself realizes the fine positioning of the motion track. The device of the invention scans the optical element by means of a spiral processing track and changes parameters, and realizes the polishing of the surface of the optical element by means of a combination of melting and gasification. The device of the invention can realize linear or circular motion above the meter level.

Description

technical field [0001] The invention relates to the technical field of surface precision and ultra-precision processing of optical elements, in particular to meter-level large-diameter optical elements CO 2 Laser polishing device and polishing method. Background technique [0002] With the development of space optics, aerospace and other science and technology, higher and higher requirements are put forward for precision optical planar components. Not only the precision requirements are getting higher and higher, but also the size is getting larger and larger, which poses new challenges to the manufacture of optical components. . Traditional optical components generally need to go through blanking, grinding, rough polishing, semi-finish polishing, fine polishing and other processes, especially the grinding and polishing process, which not only takes a long time, pollutes the environment, but also causes impurities to penetrate into the processed components. , affects the s...

AI Technical Summary

Problems solved by technology

Traditional optical components generally need to go through blanking, grinding, rough polishing, semi-finish polishing, fine polishing and other processes, especially the grinding and polishing process, which not only takes a long time, pollutes the environment, but also causes impurities to penetrate into the processed components. , affecting the service life of optical components, especially under the action of strong laser light, trace impurities can easily induce defects after repeated actions, resulting in component damage or even scrapping

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