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Electron beam divergence angle measuring device and preparation method and measuring method thereof

A measuring device and electron beam technology, applied in measuring devices, radiation measurement, X/γ/cosmic radiation measurement, etc., can solve the extremely high collimation requirements of the experimental device, which is not suitable for the measurement of the divergence angle of the electron beam, and is difficult to measure On-site development and other issues to achieve the effect of easy control, high precision and simple operation

Active Publication Date: 2020-07-14
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Conventional methods for measuring the divergence angle of electron beams include fluorescent screen method, multi-slit method, single-slit scanning method and pepper hole method, etc., but these methods have low measurement accuracy.
At present, the more advanced method is the Cherenkov radiation method, such as the literature "Research on advanced measurement methods for high-brightness electron beam emittance, beam length and beam spot (Ph. The distribution measurement device and measurement method (CN106970411A) introduces the Cerenkov radiation method to measure the divergence angle of the electron beam, but this measurement method has extremely high requirements on the collimation of the experimental device, and the system adjustment is complicated, which is not easy to carry out at the measurement site. and other problems, it is not suitable for the measurement of electron beam divergence angle of reflective high energy electron diffractometer

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  • Electron beam divergence angle measuring device and preparation method and measuring method thereof
  • Electron beam divergence angle measuring device and preparation method and measuring method thereof

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Experimental program
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Embodiment 1

[0026] like Figure 1-2 As shown, the present embodiment provides a device for measuring the divergence angle of electron beams, which is applied to a reflective high-energy electron diffractometer. The device includes a fluorescent screen 1 and a tungsten micro-nano pattern 201. The length is 20mm; the thickness is 1mm. The tungsten micro-nano pattern 201 is a plurality of concentric circles, the minimum radius of the concentric circles is 10 μm, the maximum radius is 150 μm, and the radius interval is 10 μm. The concentric circles are formed by tungsten wires 202 obtained by depositing tungsten hexacarbonyl. The shape of the tungsten wires 202 is Cylindrical with a diameter of 50nm.

[0027] The preparation method of the measuring device for the electron beam divergence angle of the reflective high energy electron diffractometer comprises the following steps:

[0028] 1. Fluorescent screen 1 surface cleaning: put the fluorescent screen 1 in the helium ion microscope, and w...

Embodiment 2

[0033] The measuring device of electron beam divergence angle in the present embodiment, as figure 1 As shown, it includes fluorescent screen 1 and tungsten micro-nano pattern 201. Fluorescent screen 1 is a conventional fluorescent screen, which is square in shape with a side length of 20-30mm and a thickness of 3mm. The tungsten micro-nano patterns 201 are concentric circles with a minimum radius of 10 μm, a maximum radius of 150 μm, and a radius interval of 20 μm. The tungsten wire 202 obtained by depositing tungsten hexacarbonyl is cylindrical in shape with a diameter of 150 nm.

[0034] The preparation method of the measuring device for the electron beam divergence angle of the reflective high energy electron diffractometer comprises the following steps:

[0035] 1. Fluorescent screen 1 surface cleaning: put the fluorescent screen 1 in the helium ion microscope, and wait for the vacuum to reach 10 -3 When the Pa is below, use ions to clean for 5 minutes to remove oxides ...

Embodiment 3

[0038] The measuring device of the electron beam divergence angle of the present embodiment, such as figure 1 As shown, it includes fluorescent screen 1 and tungsten micro-nano pattern 201. Fluorescent screen 1 is a conventional fluorescent screen, which is square in shape, with a side length of 25 mm and a thickness of 2 mm. The tungsten micro-nano patterns 201 are concentric circles with a minimum radius of 10 μm, a maximum radius of 150 μm, and a radius interval of 15 μm. The tungsten wire 202 obtained by depositing tungsten hexacarbonyl is cylindrical in shape with a diameter of 100 nm.

[0039] The preparation method of the measuring device for the electron beam divergence angle of the reflective high energy electron diffractometer comprises the following steps:

[0040] 1. Fluorescent screen 1 surface cleaning: put the fluorescent screen 1 in the helium ion microscope, and wait for the vacuum to reach 10 -3 When the Pa is below, use ions to clean for 4 minutes to remove ...

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Abstract

The invention discloses an electron beam divergence angle measuring device and a preparation method and a measuring method thereof. The device comprises a fluorescent screen and tungsten micro-nano patterns, tungsten hexacarbonyl is deposited on the fluorescent screen through a helium ion microscope to form the tungsten micro-nano patterns, the tungsten micro-nano patterns are a plurality of concentric circles, and the circle centers of the concentric circles are located in the center of the fluorescent screen. A tungsten micro-nano pattern is constructed on a fluorescent screen by utilizing ion-assisted deposition of a helium ion microscope, when the fluorescent screen is moved, the spot shape and the size of an electron beam hit on the fluorescent screen are changed, and an electron beamspot and an electron beam divergence angle are directly measured according to the size and the size of the tungsten micro-nano pattern. The device has the advantages of multiple functions, high measurement precision, simple operation and the like; the preparation method has the advantages of high precision, easiness in control, simple process and the like.

Description

technical field [0001] The invention relates to the technical field of electron beam divergence angle measurement, in particular to an electron beam divergence angle measurement device, a preparation method and a measurement method thereof. Background technique [0002] The reflective high energy electron diffractometer (RHEED) is mainly composed of an electron gun and a fluorescent screen. It is a powerful in-situ analysis and monitoring method in surface science and atomic-level synthetic material engineering. In order to improve the resolution of electron diffraction, the divergence angle of the electron beam is required to be relatively high, generally less than 0.1mrad. Conventional methods for measuring the divergence angle of electron beams include fluorescent screen method, multi-slit method, single-slit scanning method and pepper hole method, etc., but these methods have low measurement accuracy. At present, the more advanced method is the Cherenkov radiation metho...

Claims

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Application Information

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IPC IPC(8): G01T1/29G01T7/00
CPCG01T1/2907G01T7/00
Inventor 马玉田刘俊标韩立赵伟霞王鹏飞
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
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