Efficient three-dimensional sulfide end face coupler applied to communication waveband and preparation method thereof

Abstract

The invention belongs to the technical field of semiconductors, and relates to an efficient three-dimensional sulfide end face coupler applied to a communication waveband and a preparation method thereof. The end face coupler sequentially comprises a substrate, a lower cladding, a fiber core and an upper cladding from bottom to top. The fiber core is of a three-dimensional inverted-cone-shaped structure, and the width value and the height value of the fiber core are gradually increased from the end face of one end of the coupler to the end face of the other end of the coupler in the light beampropagation direction. The cross section size of the coupler fiber core is changed simultaneously in the light propagation direction in height and width, the mode size of the waveguide can be amplified simultaneously in the transverse direction and the longitudinal direction, high-efficiency coupling of spatial light and a chip is achieved, and the problem that a traditional end face coupler is low in coupling efficiency is effectively solved. According to the invention, Sulfide is selected as a coupler fiber core material, so introduction of indirect insertion loss can be avoided, the characteristics of low insertion loss, compact structure, polarization insensitivity and the like are achieved, and application and popularization in the fields of semiconductor integrated optoelectronics,all-optical signal processing and the like are facilitated.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and more specifically relates to a high-efficiency three-dimensional sulfide end-face coupler applied to communication bands and a preparation method thereof. Background technique [0002] At present, with the explosive growth of people's demand for information, the increasing amount of information transmission and transmission rate make the traditional photoelectric communication mode consume more and more power. On-chip integrated devices have significant advantages such as high integration, small size, low power consumption, fast transmission rate, low noise, and high reliability. They have important potential applications in the field of communication and other fields, and are an optimal solution to the development bottleneck of traditional communication devices. . [0003] However, the size of waveguides in on-chip devices in communication bands is generally on the order of sub-micro...

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Problems solved by technology

Therefore, its mode field size is very small compared to the input and output fibers, and directly aligning the two will cause a large mode field mismatch loss. Therefore, the problem of high insertion loss of on-chip devices has always been a problem.

The end-face coupler has a traditional on-chip end-face coupling device, because only the width of the waveguide is adjusted, the adjustable parameter is small, and the theoretical coupling efficiency is low (currently 50%-60%)

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