Integrated micro-processing device for gas sensor chip
A gas sensor and micromachining technology, applied in microstructure devices, manufacturing microstructure devices, microelectronic microstructure devices, etc., can solve problems such as complex equipment, reduce processing cycles, avoid errors, selectivity and power consumption guarantees Effect
Active Publication Date: 2020-08-07
HUAZHONG UNIV OF SCI & TECH
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Problems solved by technology
[0004] In view of the above defects or improvement needs of the prior art, the present invention provides an integrated micro-processing device for gas sensor chips, the gas sensor micro-processing platform integrates laser etching, ultraviolet exposure, micro-spray film formation and high-precision silk screen printing functions , which solves the problem that a series of complex equipment is required to manufacture gas sensors in the traditional way. At the same time, the functions of the platform are all realized by operating computers, which reduces the errors caused by human operations, and thus greatly improves the prepared gas sensors. Sensor Consistency
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[0027] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
[0028] Such as figure 1 and 2 As shown, an integrated microprocessing device for a gas sensor chip includes a laser 2, an optical platform 1, an adsorption platform 3, an exposure lamp 4, a micro-spray mechanism 5, and a printing screen.
[0029] The optical table 1 is the load-bearing desktop of the entire operation table. The thick and solid structure of the optical table 1 can meet the requ...
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The invention belongs to the related technical field of gas sensors, and relates to an integrated micromachining device for a gas sensor chip. The micromachining device integrates laser etching, ultraviolet exposure and micro-spraying film forming functions and comprises an optical platform, a laser device, an adsorption platform, an exposure lamp, a micro-spraying mechanism and a sliding table, and the optical platform is a carrier of other components; the adsorption platform is used for placing a substrate of a to-be-formed gas sensor; the sliding table has freedom degrees in the X direction, the Y direction and the Z direction and is used for adsorbing the mask and placing the mask on the substrate on the adsorption platform. The exposure lamp is used for exposing the substrate on whichthe mask plate is placed; the laser is used for carrying out laser etching on the substrate according to a preset pattern; and the micro-spraying mechanism is used for forming a gas sensitive film onthe gas sensor to be formed. By means of the method, the problem that a series of complex devices are needed for manufacturing the gas sensor in a traditional mode is solved, errors caused by manualoperation are reduced, and the consistency of the gas sensor is improved.
Description
technical field [0001] The invention belongs to the technical field related to gas sensors, and more specifically relates to an integrated microprocessing device for gas sensor chips. Background technique [0002] As a non-negligible member of sensor types, gas sensors are widely used in people's daily life. In recent years, sensors have been more combined with artificial intelligence, Internet of Things and other fields, and the application of gas sensors to smart terminals is the mainstream trend of development. In order to meet this demand, the gas sensor must be miniaturized, integrated, and mass-produced. [0003] Micro-Electro-Mechanical-Systems (MEMS, Micro-Electro-Mechanical-Systems) refers to mass-produced micro-mechanisms, micro-sensors, micro-actuators, and signal processing and control circuits, until interfaces, communications and power supplies are integrated into one or more A tiny device or system on a chip. Gas sensors that can be applied to smart termina...
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IPC IPC(8): G01N33/00G03F7/20B81C1/00
CPCB81B2201/02B81C1/00015G01N33/0004G03F7/70491G03F7/70775G03F7/70991
Inventor 张顺平杨恒
Owner HUAZHONG UNIV OF SCI & TECH