Narrow-linewidth continuous wave frequency modulation laser based on silicon-based external cavity self-injection

A laser and narrow linewidth technology, applied in the field of frequency modulation lasers, to achieve the effect of improving tuning rate and tuning bandwidth, low transmission loss, and compressing spectral linewidth

Active Publication Date: 2020-09-01
深圳灵动芯光科技有限公司
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  • Narrow-linewidth continuous wave frequency modulation laser based on silicon-based external cavity self-injection
  • Narrow-linewidth continuous wave frequency modulation laser based on silicon-based external cavity self-injection
  • Narrow-linewidth continuous wave frequency modulation laser based on silicon-based external cavity self-injection

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Embodiment Construction

[0043] Specific embodiments of the present invention will now be described in conjunction with the corresponding drawings. However, this invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. These embodiments are provided only so that the present invention will be thorough and complete so that those skilled in the art can fully describe the scope of the present invention. Wording used in the detailed description of the embodiments illustrated in the drawings should not limit the invention.

[0044] Fig. 1(a) is a structural diagram of the narrow linewidth laser of the present invention. Wherein the substrate layer 101 is a silicon substrate, the top of the substrate layer 101 is the optical waveguide layer 104, the optical waveguide layer 104 is a silicon nitride waveguide, and there is SiO around the SiN waveguide. 2 The oxide layer wraps the core-clad structure that constitutes the waveguide, SiO 2 No...

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Abstract

The invention provides a continuously tunable narrow linewidth laser which comprises a silicon-based outer cavity (111). The silicon-based outer cavity (111) comprises a substrate layer (101); an optical waveguide layer (104) which is arranged above the substrate layer (101) and forms a self-injection micro-ring resonant cavity to obtain the frequency-adjustable continuous wave laser; and a distributed feedback laser (103) which is coupled with the end surface of the silicon-based outer cavity (111), couples the laser into the micro-ring resonator (110), and outputs the frequency-modulated continuous wave laser through the silicon-based outer cavity (111). According to the narrow linewidth laser, the continuous tunable frequency modulation can be achieved, the application of a frequency modulation light source is met, and the design size and the laser coupling optimization can be achieved.

Description

technical field [0001] The invention belongs to the field of frequency modulation lasers, in particular to a narrow line width continuous wave frequency modulation laser based on silicon-based external cavity self-injection. Background technique [0002] Narrow linewidth i.e. low noise, low relative intensity noise (RIN) and wide range CW FM lasers have important applications in many application scenarios, such as coherent optical communication, laser radar (LiDAR) and biosensing. At the same time, the higher output optical power avoids the use of amplifiers, making high-power lasers have a great demand for improving system performance. [0003] Frequency-modulated continuous wave (FMCW) lidar transmits frequency-modulated continuous wave signals and receives echoes reflected by objects, and detects the distance and speed of objects by demodulating the coherent signals between the transmitted waves and the received reflected waves. The maximum detection distance is limited ...

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Application Information

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IPC IPC(8): H01S3/063H01S3/08H01S3/106
CPCH01S3/0635H01S3/08072H01S3/1067
Inventor 陈明华汤黎伟李佳琛
Owner 深圳灵动芯光科技有限公司
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