Terminal structure of MOSFET device and preparation method and application of terminal structure
A terminal structure and device technology, used in semiconductor/solid-state device manufacturing, semiconductor devices, electrical components, etc., can solve the problems of MOSFET device withstand voltage and leakage, and solve the problems of low withstand voltage and leakage, reduce costs, and suppress leakage. Effect
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Embodiment 1
[0036] Such as figure 2 As shown, Embodiment 1 proposes a terminal structure of a MOSFET device, including more than one group of four silicon carbide trench rings (211, 212, 213, 214).
[0037] The silicon carbide trench rings (211, 212, 213, 214) are all closed rings.
[0038] The innermost silicon carbide trench ring (211) is connected to the low potential of the chip, and the innermost silicon carbide trench ring (211) is arranged on a side close to the gate metal (21).
[0039] The outermost groups of silicon carbide trench rings (214) are stop rings, the potential of the stop rings is connected to the scribing lane (23) of the chip, and the outermost silicon carbide trench rings (214) are set On the side close to the scribe lane (23).
[0040] Two sets of silicon carbide groove rings (212, 213) are further arranged between the innermost silicon carbide groove ring (211) and the outermost silicon carbide groove ring (214).
[0041] The preparation method of the termi...
Embodiment 2
[0045] Such as image 3 As shown, Embodiment 2 proposes a terminal structure of a MOSFET device, including more than one group of four silicon carbide trench rings (311, 312, 313, 314).
[0046] The silicon carbide trench rings (311, 312, 313, 314) are all closed rings.
[0047] The innermost silicon carbide trench ring (311) is connected to the low potential of the chip.
[0048] The outermost groups of silicon carbide trench rings (314) are stop rings, the potential of the stop rings is connected to the scribing lane (33) of the chip, and the outermost silicon carbide trench rings (314) are set On the side close to the scribe lane (33).
[0049] Two sets of silicon carbide groove rings (312, 313) are further arranged between the innermost silicon carbide groove ring (311) and the outermost silicon carbide groove ring (314).
[0050] The preparation method of the terminal structure of the MOSFET device of embodiment 2, comprises the steps:
[0051] Connect the low potent...
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