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A narrow linewidth tunable laser and its preparation method

A laser and narrow linewidth technology, applied in the field of lasers, can solve the problems of chip yield drop, affect chip end surface coating and mounting process, and reliability drop, so as to improve stability, reduce beam divergence angle, and reduce size Effect

Active Publication Date: 2020-11-24
武汉敏芯半导体股份有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The larger the size of the laser chip, the more serious the warpage. The warpage caused by the size will seriously affect the coating and mounting process of the chip end face, resulting in a decrease in chip yield and reliability.

Method used

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  • A narrow linewidth tunable laser and its preparation method
  • A narrow linewidth tunable laser and its preparation method
  • A narrow linewidth tunable laser and its preparation method

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Embodiment Construction

[0033] The narrow linewidth tunable laser chip of the present invention and its preparation method and laser will be further described below in conjunction with the accompanying drawings:

[0034] The present invention provides a small-sized narrow-linewidth laser chip based on vertical coupling and micro-ring reflection technology. The active gain waveguide of the laser chip is used to provide signal gain; the lower passive waveguide is used as an expansion cavity of the active gain waveguide, The line width of the output signal is compressed; the upper passive waveguide exchanges optical signals with the lower passive waveguide through vertical coupling technology, which prolongs the cavity length and further compresses the signal line width; the microring reflector is coupled with the upper passive waveguide, on the one hand It acts as a mirror, and on the other hand, it also compresses the linewidth of the laser; the lower passive waveguide and the upper passive waveguide a...

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Abstract

The invention discloses a narrow-linewidth tunable laser device and a preparation method thereof. A laser chip sequentially comprises a substrate layer, a lower waveguide layer and an upper waveguidelayer from bottom to top, wherein the lower waveguide layer and the upper waveguide layer are positioned on different planes and perform optical energy exchange through vertical coupling, the lower waveguide layer is provided with an active gain waveguide and a lower-layer passive waveguide which are connected in a butt joint mode, the lower-layer passive waveguide is provided with a plurality ofbent waveguides to prolong the cavity length, the upper waveguide layer is provided with an upper-layer passive waveguide and a micro-ring reflector, the upper-layer passive waveguide and the lower-layer passive waveguide are vertically coupled through a coupler, the micro-ring reflector is coupled with the upper-layer passive waveguide, and the upper-layer passive waveguide is provided with a plurality of bent waveguides to prolong the cavity length. The narrow-linewidth tunable laser device is small in laser chip size, tunable, narrow in linewidth, low in cost and high in stability.

Description

technical field [0001] The invention relates to the technical field of lasers, in particular to a narrow-linewidth tunable laser and a preparation method thereof. Background technique [0002] Since coherent technology is suitable for long-distance transmission, communication fields such as backbone networks and data center interconnection mainly use coherent optical modules with transmission rates of 400G and greater than 400G. Among them, the coherent technology has strict requirements on the phase noise (ie linewidth) of the laser transmitter. With the increase of the transmission bandwidth, the requirements for the line width of the laser are also increasing. For example, in 400G coherent technology, the line width of the laser is required to be less than 100 kHz. In addition, in order to further expand the bandwidth by using wavelength division multiplexing technology, coherent technology is more inclined to use wavelength tunable light sources. The current narrow lin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01S5/10H01S5/12H01S5/20H01S5/068
CPCH01S5/068H01S5/101H01S5/12H01S5/20
Inventor 魏思航阳红涛王任凡
Owner 武汉敏芯半导体股份有限公司
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