Electric heating wire, method for manufacturing electric heating wire, and vacuum processing device
A manufacturing method and heating wire technology, applied in chemical instruments and methods, ohmic resistance heating parts, heating element shapes, etc., can solve the problems of high resistance of core materials and inability to prolong life
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no. 1 approach ＞
[0051] [Structure of Catalytic Chemical Vapor Deposition Apparatus]
[0052] figure 1 It is a schematic configuration diagram showing the catalytic chemical vapor deposition apparatus according to the first embodiment of the present invention. The catalytic chemical vapor deposition apparatus 1 of this embodiment has a vacuum chamber 3 in which a reaction chamber 2 is formed. The vacuum chamber 3 is connected with a vacuum pump 4, which can evacuate the reaction chamber 2 to a specified vacuum degree. The reaction chamber 2 is formed on the inner side of a landing prevention plate 5 provided inside the vacuum chamber 3 .
[0053] Inside the reaction chamber 2 partitioned by the landing prevention plate 5, a plurality of catalytic filaments 10 are provided. The catalytic wire 10 is composed of a heating wire having a structure described later. In the present embodiment, the plurality of catalytic wires 10 are arranged in parallel so as to traverse the inside of the reaction...
no. 2 approach ＞
[0117] Figure 8 It is a flowchart showing the manufacturing process of the catalytic wire 20 according to the second embodiment of the present invention. Figure 9 is a cross-sectional view showing the catalytic wire 20 .
[0118] The catalytic wire 20 is not limited to the form described in the first embodiment, and may be manufactured without performing the carbon removal step in step S13, for example.
[0119] In addition, in each of the following embodiments, the same structures as those in the first embodiment are assigned the same symbols and descriptions thereof are omitted.
[0120] (Step S11: setting of tantalum wire)
[0121] In step S11, similarly to the first embodiment, the Figure 4 The tantalum wire 101 shown in (A) is set in a vacuum chamber.
[0122] (Step S12: carbonization treatment)
[0123] In step S12, similarly to the first embodiment, the inside of the vacuum chamber is decompressed to a vacuum atmosphere of, for example, about 1 Pa, and the tanta...
no. 3 approach ＞
[0133] Figure 10 It is a cross-sectional view showing the catalytic wire 30 according to the third embodiment of the present invention.
[0134] The catalytic wire 30 may also be composed of a two-layer structure as a whole instead of a three-layer structure.
[0135] The catalytic wire 30 has a core material 11 similar to the first embodiment, and a cover layer 32 formed of tantalum boride which is a boride of tantalum on a surface 32 a. In this embodiment, the covering layer 32 is formed of one layer and covers the surface 11 a of the core material 11 .
[0136] The capping layer 32 is formed of tantalum boride. Accordingly, silicide of the catalytic wire 30 due to silicon contained in the film-forming gas can be prevented, and a decrease in the mechanical strength of the catalytic wire 30 can be suppressed. In addition, since the covering layer 32 can be made hard, thermal elongation of the catalytic wire 30 can be reduced and durability can be improved.
[0137] Furth...
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Abstract
Description
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Application Information
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